March 2001 Archives by author

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Starting: Mon Mar 12 03:01:49 PST 2001
Ending: Sat Mar 31 10:50:43 PST 2001
Messages: 18

• Shutdown stsetch 2001-03-12 15:01:48: Turbo off fault.   booth at snf.stanford.edu
• Shutdown stsetch 2001-03-12 15:01:48: Turbo off fault.   booth at snf.stanford.edu
• Problem stsetch 2001-03-13 10:31:04: turbo pump off.   booth at snf.stanford.edu
• Shutdown stsetch 2001-03-13 10:30:27: turbo pump down   booth at snf.stanford.edu
• Problem stsetch 2001-03-21 19:37:46: Low helium pressure   cbaxter at snf.stanford.edu
• Shutdown stsetch 2001-03-27 13:16:43: wafer broken inside chamber   cbaxter at snf.stanford.edu
• Shutdown stsetch 2001-03-13 10:30:27: turbo pump down   dtchang at snf.stanford.edu
• Problem stsetch 2001-03-13 10:31:04: turbo pump off.   dtchang at snf.stanford.edu
• Shutdown stsetch 2001-03-16 17:58:58: turbo down   dtchang at snf.stanford.edu
• Shutdown stsetch 2001-03-27 13:16:43: wafer broken inside chamber   dtchang at snf.stanford.edu
• Shutdown stsetch 2001-03-16 17:58:58: turbo down   latta at snf.stanford.edu
• Shutdown stsetch 2001-03-19 00:00:28: Broken Wafer   latta at snf.stanford.edu
• Problem stsetch 2001-03-21 19:37:46: Low helium pressure   pindermu at snf.stanford.edu
• Problem stsetch 2001-03-31 09:35:55: wafer piece in chamber, etching should be ok   svargo at snf.stanford.edu
• Comment stsetch 2001-03-31 09:36:39: small wafer piece in chamber, etcher still ok to use   svargo at snf.stanford.edu
• Problem stsetch 2001-03-31 10:50:27: still ok to use   svargo at snf.stanford.edu
• Comment stsetch 2001-03-31 10:50:42: still ok to use.   svargo at snf.stanford.edu
• Shutdown stsetch 2001-03-19 00:00:28: Broken Wafer   vik at snf.stanford.edu

Last message date: Sat Mar 31 10:50:43 PST 2001
Archived on: Fri Jan 11 13:11:06 PST 2013

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