From kjliu at snf.stanford.edu Fri May 4 01:19:49 2001 From: kjliu at snf.stanford.edu (kjliu at snf.stanford.edu) Date: May 4, 2001 1:19:49 AM Subject: Shutdown stsetch 2001-05-04 01:19:48: wafer stuck Message-ID: From booth at snf.stanford.edu Fri May 4 06:31:19 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 4, 2001 6:31:19 AM Subject: Shutdown stsetch 2001-05-04 01:19:48: wafer stuck Message-ID: Cleared. restarted machine & unloaded wafer from etch chamber to LoadLock. From franklin at snf.stanford.edu Sun May 13 03:42:27 2001 From: franklin at snf.stanford.edu (franklin at snf.stanford.edu) Date: May 13, 2001 3:42:27 PM Subject: Problem stsetch 2001-05-13 15:42:25: ON LED out Message-ID: The green "ON" LED on the front of the STS is out. It appears that it is just a problem with the LED since I'm still able to load/unload and process wafers. From booth at snf.stanford.edu Wed May 16 12:59:33 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 16, 2001 12:59:33 PM Subject: Problem stsetch 2001-05-13 15:42:25: ON LED out Message-ID: Someone had turned off the plug strip that powers the LED indicator. From dton at snf.stanford.edu Fri May 18 03:23:22 2001 From: dton at snf.stanford.edu (dton at snf.stanford.edu) Date: May 18, 2001 3:23:22 PM Subject: Shutdown stsetch 2001-05-18 15:23:21: Wafer broke Message-ID: Wafer was broken during etch. Pieces inside. From booth at snf.stanford.edu Fri May 18 05:49:27 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 18, 2001 5:49:27 PM Subject: Shutdown stsetch 2001-05-18 15:23:21: Wafer broke Message-ID: Cleaned up broken wafer & restarted machine. Is it a surprise that when you deep etch and leave only 10 microns of Silicon, with 10 Torr of Helium pressure on the backside, that the wafer blows up? If you etch so that there is less than 100 microns of material left, you are required to bond your process wafer to a carrier wafer. If you need an exception to this rule, consult with SNF staff for alternatives or special approval. From booth at snf.stanford.edu Mon May 21 10:01:42 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 21, 2001 10:01:42 AM Subject: Shutdown stsetch 2001-05-21 10:01:41: Out of Freon 318 Message-ID: new bottle will be installed later this morning. From cbaxter at snf.stanford.edu Mon May 21 04:38:20 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 21, 2001 4:38:20 PM Subject: Shutdown stsetch 2001-05-21 16:38:20: need to recycle fomblin oil on load lock Message-ID: From cbaxter at snf.stanford.edu Mon May 21 04:38:33 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 21, 2001 4:38:33 PM Subject: Shutdown stsetch 2001-05-21 16:38:32: Message-ID: From cbaxter at snf.stanford.edu Mon May 21 04:54:00 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 21, 2001 4:54:00 PM Subject: Shutdown stsetch 2001-05-21 16:38:32: Message-ID: From cbaxter at snf.stanford.edu Mon May 21 04:54:21 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 21, 2001 4:54:21 PM Subject: Shutdown stsetch 2001-05-21 16:38:20: need to recycle fomblin oil on load lock Message-ID: cycled oil completed From pindermu at snf.stanford.edu Thu May 24 11:48:17 2001 From: pindermu at snf.stanford.edu (pindermu at snf.stanford.edu) Date: May 24, 2001 11:48:17 PM Subject: Problem stsetch 2001-05-24 23:48:16: platen power down Message-ID: During the etching cycle, the platen power stays at 0 W From booth at snf.stanford.edu Fri May 25 07:39:19 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 25, 2001 7:39:19 AM Subject: Shutdown stsetch 2001-05-21 10:01:41: Out of Freon 318 Message-ID: From booth at snf.stanford.edu Fri May 25 11:04:22 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 25, 2001 11:04:22 AM Subject: Problem stsetch 2001-05-24 23:48:16: platen power down Message-ID: Platen power is working again. Ran 1 test wfr using recipe deep - Look OK. From caudillo at snf.stanford.edu Thu May 31 10:30:04 2001 From: caudillo at snf.stanford.edu (caudillo at snf.stanford.edu) Date: May 31, 2001 10:30:04 AM Subject: Problem stsetch 2001-05-31 10:30:04: communications errors Message-ID: Some messages have popped up 1. ICP fault: communications failure 2. failed to meet maximum pump down exceeded Wafer is inside the chamber. From booth at snf.stanford.edu Thu May 31 10:53:22 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 31, 2001 10:53:22 AM Subject: Problem stsetch 2001-05-31 10:30:04: communications errors Message-ID: Needed to turn "Emiss" for Ion guage controller to clear fault. Machine is operable again.