Problem stsetch 2001-05-13 15:42:25: ON LED out
franklin at snf.stanford.edu
franklin at snf.stanford.edu
Sun May 13 03:42:27 PDT 2001
The green "ON" LED on the front of the STS is out. It appears that it is just a problem with the LED since I'm still able to load/unload and process wafers.
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