Shutdown stsetch 2001-05-18 15:23:21: Wafer broke
dton at snf.stanford.edu
dton at snf.stanford.edu
Fri May 18 03:23:22 PDT 2001
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Shutdown stsetch 2001-05-18 15:23:21: Wafer broke
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Wafer was broken during etch. Pieces inside.
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Shutdown stsetch 2001-05-18 15:23:21: Wafer broke
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