Problem stsetch 2001-05-24 23:48:16: platen power down
pindermu at snf.stanford.edu
pindermu at snf.stanford.edu
Thu May 24 11:48:17 PDT 2001
Previous message:
Shutdown stsetch 2001-05-21 10:01:41: Out of Freon 318
Next message:
Problem stsetch 2001-05-24 23:48:16: platen power down
Messages sorted by:
[ date ]
[ thread ]
[ subject ]
[ author ]
During the etching cycle, the platen power stays at 0 W
Previous message:
Shutdown stsetch 2001-05-21 10:01:41: Out of Freon 318
Next message:
Problem stsetch 2001-05-24 23:48:16: platen power down
Messages sorted by:
[ date ]
[ thread ]
[ subject ]
[ author ]
More information about the stsetch-pcs mailing list