November 2001 Archives by date

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Starting: Thu Nov 1 01:06:36 PST 2001
Ending: Fri Nov 30 12:10:05 PST 2001
Messages: 16

• Problem stsetch 2001-11-01 13:06:35: wafer did not unload from chamber   gyama at snf.stanford.edu
• Problem stsetch 2001-11-01 13:06:35: wafer did not unload from chamber   booth at snf.stanford.edu
• Shutdown stsetch 2001-11-03 14:53:40: Failed to load the wafer   chcheng at snf.stanford.edu
• Shutdown stsetch 2001-11-03 14:53:40: Failed to load the wafer   booth at snf.stanford.edu
• Shutdown stsetch 2001-11-25 22:22:41: Code 145 Alarm, etc.   mbartsch at snf.stanford.edu
• Shutdown stsetch 2001-11-26 18:20:35: wafer broke during etching   luanv at snf.stanford.edu
• Shutdown stsetch 2001-11-25 22:22:41: Code 145 Alarm, etc.   booth at snf.stanford.edu
• Shutdown stsetch 2001-11-26 18:20:35: wafer broke during etching   cbaxter at snf.stanford.edu
• Shutdown stsetch 2001-11-28 02:51:12: machine failure during etch pump down   kjliu at snf.stanford.edu
• Shutdown stsetch 2001-11-28 02:51:12: machine failure during etch pump down   booth at snf.stanford.edu
• Shutdown stsetch 2001-11-28 23:45:49: Software problem(communication timeout)   daesung at snf.stanford.edu
• Shutdown stsetch 2001-11-28 23:45:49: Software problem(communication timeout)   booth at snf.stanford.edu
• Shutdown stsetch 2001-11-30 10:54:24: Turbo Shutdown E006 (Error006)   parco at snf.stanford.edu
• Shutdown stsetch 2001-11-30 10:54:24: Turbo Shutdown E006 (Error006)   booth at snf.stanford.edu
• Shutdown stsetch 2001-11-30 11:49:01: E006 came "on" again   parco at snf.stanford.edu
• Shutdown stsetch 2001-11-30 11:49:01: E006 came "on" again   booth at snf.stanford.edu

Last message date: Fri Nov 30 12:10:05 PST 2001
Archived on: Fri Jan 11 13:11:08 PST 2013

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