From zappe at snf.stanford.edu Mon Oct 1 01:41:39 2001 From: zappe at snf.stanford.edu (zappe at snf.stanford.edu) Date: Oct 1, 2001 1:41:39 AM Subject: Shutdown stsetch 2001-10-01 01:41:38: turbo needs restart Message-ID: After having successfully loaded a wafer I tried to start the process 'DEEP'. Although the IG3 gauge was not in 'ERR' mode the program indicated a failure. When I tried to accept the failure and restart the process a second error-message appeared (something like 'ICP not available'). At the same time I heard the turbo pump slowing down. The red warning light was on and the display indicated 'E006'. It was not possible to unload the wafer. From booth at snf.stanford.edu Mon Oct 1 09:34:13 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Oct 1, 2001 9:34:13 AM Subject: Shutdown stsetch 2001-10-01 01:41:38: turbo needs restart Message-ID: Added oil to drypump gearbox, recycled fomblin into LoadLock vane pump, restarted tool & software, unloaded zappe wafer. From jhsim at snf.stanford.edu Wed Oct 3 12:32:58 2001 From: jhsim at snf.stanford.edu (jhsim at snf.stanford.edu) Date: Oct 3, 2001 12:32:58 AM Subject: Problem stsetch 2001-10-03 00:32:58: ICP serial communication failure Message-ID: When I enabled machine, "ICP serial communication failure lalarm" message showed up. From booth at snf.stanford.edu Wed Oct 3 06:41:08 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Oct 3, 2001 6:41:08 AM Subject: Problem stsetch 2001-10-03 00:32:58: ICP serial communication failure Message-ID: restarted system software. From jdas at snf.stanford.edu Wed Oct 3 08:07:28 2001 From: jdas at snf.stanford.edu (jdas at snf.stanford.edu) Date: Oct 3, 2001 8:07:28 AM Subject: Shutdown stsetch 2001-10-03 08:07:27: Broken wafer inside Message-ID: Sorry, I was etching 60 um device Si on 350 um handle wafer. the wfer cracj`ked during unlaoding. John From booth at snf.stanford.edu Wed Oct 3 01:48:08 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Oct 3, 2001 1:48:08 PM Subject: Shutdown stsetch 2001-10-03 08:07:27: Broken wafer inside Message-ID: Opened chamber & cleaned up broken wafer pieces. Loaded dummy wafer & ran O2clean for 30 min. From chcheng at snf.stanford.edu Wed Oct 24 08:16:21 2001 From: chcheng at snf.stanford.edu (chcheng at snf.stanford.edu) Date: Oct 24, 2001 8:16:21 PM Subject: Problem stsetch 2001-10-24 20:16:20: Turbo Pump Failed Message-ID: From cbaxter at snf.stanford.edu Wed Oct 24 10:40:57 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Oct 24, 2001 10:40:57 PM Subject: Problem stsetch 2001-10-24 20:16:20: Turbo Pump Failed Message-ID: system locked and load arm jammed between load lock and chamber. moved arm back and removed wafer. From jdas at snf.stanford.edu Fri Oct 26 06:26:42 2001 From: jdas at snf.stanford.edu (jdas at snf.stanford.edu) Date: Oct 26, 2001 6:26:42 AM Subject: Problem stsetch 2001-10-26 06:26:41: STS Software problem Message-ID: STS display monitor showing "program manager [multiplex] From booth at snf.stanford.edu Fri Oct 26 06:47:05 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Oct 26, 2001 6:47:05 AM Subject: Problem stsetch 2001-10-26 06:26:41: STS Software problem Message-ID: restarted operator control station. From yangxu at snf.stanford.edu Fri Oct 26 01:57:11 2001 From: yangxu at snf.stanford.edu (yangxu at snf.stanford.edu) Date: Oct 26, 2001 1:57:11 PM Subject: Shutdown stsetch 2001-10-26 13:57:11: wafer broken inside chamber Message-ID: during through wafer etching, wafer was broken in the chamber. Chuck was used. From cbaxter at snf.stanford.edu Fri Oct 26 04:50:18 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Oct 26, 2001 4:50:18 PM Subject: Shutdown stsetch 2001-10-26 13:57:11: wafer broken inside chamber Message-ID: cleaned up broken wafer chip's and ran o2 clean From dtchang at snf.stanford.edu Fri Oct 26 07:12:04 2001 From: dtchang at snf.stanford.edu (dtchang at snf.stanford.edu) Date: Oct 26, 2001 7:12:04 PM Subject: Problem stsetch 2001-10-26 19:12:03: Etch Rates Off Message-ID: After running a few wafers, the etch rate seems to be way off. From cbaxter at snf.stanford.edu Fri Oct 26 09:19:35 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Oct 26, 2001 9:19:35 PM Subject: Problem stsetch 2001-10-26 19:12:03: Etch Rates Off Message-ID: ran regular recipe with resist From chcheng at snf.stanford.edu Sat Oct 27 02:36:25 2001 From: chcheng at snf.stanford.edu (chcheng at snf.stanford.edu) Date: Oct 27, 2001 2:36:25 PM Subject: Shutdown stsetch 2001-10-27 14:36:24: Turbo Pump Failed Message-ID: From booth at snf.stanford.edu Mon Oct 29 07:17:16 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Oct 29, 2001 7:17:16 AM Subject: Shutdown stsetch 2001-10-27 14:36:24: Turbo Pump Failed Message-ID: rebooted system & removed wafer (chcheng).