Shutdown stsetch 2001-10-03 08:07:27: Broken wafer inside

jdas at snf.stanford.edu jdas at snf.stanford.edu
Wed Oct 3 08:07:28 PDT 2001


Sorry, I was etching 60 um device Si on 350 um handle wafer.
the wfer cracj`ked during unlaoding. John




More information about the stsetch-pcs mailing list