Shutdown stsetch 2001-10-03 08:07:27: Broken wafer inside

jdas at snf.stanford.edu jdas at snf.stanford.edu
Wed Oct 3 08:07:28 PDT 2001

Previous message: Shutdown stsetch 2001-10-01 01:41:38: turbo needs restart
Next message: Shutdown stsetch 2001-10-03 08:07:27: Broken wafer inside
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Sorry, I was etching 60 um device Si on 350 um handle wafer.
the wfer cracj`ked during unlaoding. John

Previous message: Shutdown stsetch 2001-10-01 01:41:38: turbo needs restart
Next message: Shutdown stsetch 2001-10-03 08:07:27: Broken wafer inside
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the stsetch-pcs mailing list