Shutdown stsetch 2001-10-03 08:07:27: Broken wafer inside

booth at snf.stanford.edu booth at snf.stanford.edu
Wed Oct 3 01:48:08 PDT 2001

Previous message: Shutdown stsetch 2001-10-03 08:07:27: Broken wafer inside
Next message: Problem stsetch 2001-10-03 00:32:58: ICP serial communication failure
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Opened chamber & cleaned up broken
wafer pieces.  Loaded dummy wafer &
ran O2clean for 30 min.

Previous message: Shutdown stsetch 2001-10-03 08:07:27: Broken wafer inside
Next message: Problem stsetch 2001-10-03 00:32:58: ICP serial communication failure
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the stsetch-pcs mailing list