Shutdown stsetch 2001-10-26 13:57:11: wafer broken inside chamber

yangxu at snf.stanford.edu yangxu at snf.stanford.edu
Fri Oct 26 01:57:11 PDT 2001

Previous message: Problem stsetch 2001-10-24 20:16:20: Turbo Pump Failed
Next message: Shutdown stsetch 2001-10-26 13:57:11: wafer broken inside chamber
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

during through wafer etching, wafer was broken in the chamber. Chuck was used.

Previous message: Problem stsetch 2001-10-24 20:16:20: Turbo Pump Failed
Next message: Shutdown stsetch 2001-10-26 13:57:11: wafer broken inside chamber
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the stsetch-pcs mailing list