Problem stsetch 2001-10-26 19:12:03: Etch Rates Off
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Fri Oct 26 09:19:35 PDT 2001
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Problem stsetch 2001-10-26 19:12:03: Etch Rates Off
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Shutdown stsetch 2001-10-27 14:36:24: Turbo Pump Failed
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ran regular recipe with resist
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Problem stsetch 2001-10-26 19:12:03: Etch Rates Off
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Shutdown stsetch 2001-10-27 14:36:24: Turbo Pump Failed
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