Shutdown stsetch 2001-10-27 14:36:24: Turbo Pump Failed
booth at snf.stanford.edu
booth at snf.stanford.edu
Mon Oct 29 07:17:16 PST 2001
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Shutdown stsetch 2001-10-27 14:36:24: Turbo Pump Failed
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rebooted system & removed wafer (chcheng).
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Shutdown stsetch 2001-10-27 14:36:24: Turbo Pump Failed
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