From zappe at snf.stanford.edu Wed Sep 5 09:22:43 2001 From: zappe at snf.stanford.edu (zappe at snf.stanford.edu) Date: Sep 5, 2001 9:22:43 AM Subject: Shutdown stsetch 2001-09-05 09:22:40: broken wafer in chamber Message-ID: From zappe at snf.stanford.edu Wed Sep 5 09:30:51 2001 From: zappe at snf.stanford.edu (zappe at snf.stanford.edu) Date: Sep 5, 2001 9:30:51 AM Subject: Shutdown stsetch 2001-09-05 09:30:50: broken wafer in chamber Message-ID: From pindermu at snf.stanford.edu Wed Sep 5 10:06:57 2001 From: pindermu at snf.stanford.edu (pindermu at snf.stanford.edu) Date: Sep 5, 2001 10:06:57 PM Subject: Problem stsetch 2001-09-05 22:06:54: sticky lip seal Message-ID: the wafers tend to stick and come out uncentered on the trail. From latta at snf.stanford.edu Thu Sep 6 10:10:18 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sep 6, 2001 10:10:18 AM Subject: Shutdown stsetch 2001-09-06 10:10:16: Chuck & chamber cleaning Message-ID: From latta at snf.stanford.edu Thu Sep 6 04:49:20 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sep 6, 2001 4:49:20 PM Subject: Shutdown stsetch 2001-09-06 10:10:16: Chuck & chamber cleaning Message-ID: Chuck and chamber cleaned. From latta at snf.stanford.edu Thu Sep 6 04:49:32 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sep 6, 2001 4:49:32 PM Subject: Problem stsetch 2001-09-05 22:06:54: sticky lip seal Message-ID: Lip seal replaced From latta at snf.stanford.edu Thu Sep 6 05:14:10 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sep 6, 2001 5:14:10 PM Subject: Shutdown stsetch 2001-09-06 17:14:09: Can't vent loadlock. Message-ID: Machine view shows chuck lifted. Tried reboot 2 X, no joy. Wafer in chamber from O2 clean program came out fine. Seasoning still needs to be done. From hphan at snf.stanford.edu Thu Sep 6 07:01:20 2001 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Sep 6, 2001 7:01:20 PM Subject: Shutdown stsetch 2001-09-06 19:01:16: STS is working find Message-ID: From hphan at snf.stanford.edu Thu Sep 6 07:02:05 2001 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Sep 6, 2001 7:02:05 PM Subject: Shutdown stsetch 2001-09-06 17:14:09: STS is working find Message-ID: From hphan at snf.stanford.edu Thu Sep 6 07:01:38 2001 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Sep 6, 2001 7:01:38 PM Subject: Shutdown stsetch 2001-09-06 19:01:16: STS is working find Message-ID: From camelot at snf.stanford.edu Fri Sep 7 08:55:29 2001 From: camelot at snf.stanford.edu (camelot at snf.stanford.edu) Date: Sep 7, 2001 8:55:29 AM Subject: Problem stsetch 2001-09-07 08:55:26: Message-ID: From camelot at snf.stanford.edu Fri Sep 7 09:02:37 2001 From: camelot at snf.stanford.edu (camelot at snf.stanford.edu) Date: Sep 7, 2001 9:02:37 AM Subject: Shutdown stsetch 2001-09-07 09:02:35: sts shutdown Message-ID: STS shutdown. STS not venting/releasing wafer. From camelot at snf.stanford.edu Fri Sep 7 09:09:41 2001 From: camelot at snf.stanford.edu (camelot at snf.stanford.edu) Date: Sep 7, 2001 9:09:41 AM Subject: Shutdown stsetch 2001-09-07 09:09:40: STS down Message-ID: STS not releasing wafer. Does not vent, load or unload. From booth at snf.stanford.edu Fri Sep 7 10:27:25 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 7, 2001 10:27:25 AM Subject: Shutdown stsetch 2001-09-07 09:09:40: STS down Message-ID: This was a software related fault. Had to turn off turbo & do cold reboot. Loaded & unloaded test wafer OK. From booth at snf.stanford.edu Fri Sep 7 10:27:33 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 7, 2001 10:27:33 AM Subject: Shutdown stsetch 2001-09-07 09:02:35: sts shutdown Message-ID: From booth at snf.stanford.edu Fri Sep 7 10:27:40 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 7, 2001 10:27:40 AM Subject: Problem stsetch 2001-09-07 08:55:26: Message-ID: From jdas at snf.stanford.edu Wed Sep 12 12:39:23 2001 From: jdas at snf.stanford.edu (jdas at snf.stanford.edu) Date: Sep 12, 2001 12:39:23 PM Subject: Comment stsetch 2001-09-12 12:39:19: STS free tomorrow [9/13] morning Message-ID: Was able to process my wafer during the lunch, so won"t need the tool tomorrow morning From pindermu at snf.stanford.edu Wed Sep 12 11:29:40 2001 From: pindermu at snf.stanford.edu (pindermu at snf.stanford.edu) Date: Sep 12, 2001 11:29:40 PM Subject: Shutdown stsetch 2001-09-12 23:29:39: No communication with RF generator Message-ID: From pindermu at snf.stanford.edu Wed Sep 12 11:31:13 2001 From: pindermu at snf.stanford.edu (pindermu at snf.stanford.edu) Date: Sep 12, 2001 11:31:13 PM Subject: Shutdown stsetch 2001-09-12 23:31:08: No communication with RF generator Message-ID: From cbaxter at snf.stanford.edu Wed Sep 12 11:52:32 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 12, 2001 11:52:32 PM Subject: Shutdown stsetch 2001-09-12 23:31:08: No communication with RF generator Message-ID: From cbaxter at snf.stanford.edu Wed Sep 12 11:53:13 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 12, 2001 11:53:13 PM Subject: Shutdown stsetch 2001-09-12 23:29:39: No communication with RF generator Message-ID: platen rf is working now. From latta at snf.stanford.edu Wed Sep 19 11:12:02 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sep 19, 2001 11:12:02 AM Subject: Shutdown stsetch 2001-09-19 11:12:02: Wafer broken.... Message-ID: From cbaxter at snf.stanford.edu Wed Sep 19 06:27:58 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 19, 2001 6:27:58 PM Subject: Shutdown stsetch 2001-09-19 11:12:02: Wafer broken.... Message-ID: cleaned up broken wafer chips From cbaxter at snf.stanford.edu Wed Sep 19 06:28:22 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 19, 2001 6:28:22 PM Subject: Shutdown stsetch 2001-09-19 11:12:02: Wafer broken.... Message-ID: From cbaxter at snf.stanford.edu Wed Sep 19 06:28:34 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 19, 2001 6:28:34 PM Subject: Shutdown stsetch 2001-09-19 11:12:02: Wafer broken.... Message-ID: From booth at snf.stanford.edu Thu Sep 20 10:41:21 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 20, 2001 10:41:21 AM Subject: Shutdown stsetch 2001-09-20 10:41:20: need to install new F-318 bottle. Message-ID: From booth at snf.stanford.edu Thu Sep 20 11:05:36 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 20, 2001 11:05:36 AM Subject: Shutdown stsetch 2001-09-20 10:41:20: need to install new F-318 bottle. Message-ID: New F-318 bottle has been installed. From tombler at snf.stanford.edu Tue Sep 25 10:17:58 2001 From: tombler at snf.stanford.edu (tombler at snf.stanford.edu) Date: Sep 25, 2001 10:17:58 PM Subject: Problem stsetch 2001-09-25 22:17:57: turbo pump stopped Message-ID: while unloading the turbo pump stopped, needs to be restarted From cbaxter at snf.stanford.edu Tue Sep 25 11:07:59 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 25, 2001 11:07:59 PM Subject: Problem stsetch 2001-09-25 22:17:57: turbo pump stopped Message-ID: reboot tool and unload wafer.