From latta at snf.stanford.edu Wed Apr 3 01:11:24 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Apr 3, 2002 1:11:24 PM Subject: Problem stsetch 2002-03-20 12:32:09: Load lock pumping down slowwwly. Message-ID: New Nupro valve installed for loadlock purge. From bwacker at snf.stanford.edu Fri Apr 12 11:19:48 2002 From: bwacker at snf.stanford.edu (bwacker at snf.stanford.edu) Date: Apr 12, 2002 11:19:48 PM Subject: Problem stsetch 2002-04-12 23:19:48: STS interlock tripped Message-ID: Interlock tripped, my wafer is inside Barbara Wacker 408.370.6374 From eap at gloworm.Stanford.EDU Fri Apr 12 23:37:15 2002 From: eap at gloworm.Stanford.EDU (Eric Perozziello) Date: Fri, 12 Apr 2002 23:37:15 -0700 (PDT) Subject: Interlock tripped error- cleared Message-ID: <200204130637.XAA18943@gloworm.Stanford.EDU> I haven't seen this one before, but it was an easy clear. There was an "interlock tripped" error that occured in the middle of Barbara's process. I cleared it the same way we used to clear the "pumpdown time exceeded" error, and the machine appears to be happy. I didn't try etching again, but I will hang out until she tries it again. -Eric From ericp at snf.stanford.edu Sat Apr 13 12:06:05 2002 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Apr 13, 2002 12:06:05 AM Subject: Shutdown stsetch 2002-04-13 00:06:04: Coil Matching NW noise Message-ID: After clearing the interlock error, and attempting to restart an etch, the etch came alive like normal, but a faint "arcing" sound could be heard in the air outlet of the coil matching box. The PC showed that the network was actually tuning as it is supposed to, but the arcing sound remained. We aborted the process at that point. Arcing sound stopped as soon as the plasma went off. (the sound was very faint, but I have not noticed it in the past, and it sounded to me like it could be arcing but I am not sure. I did not notice any other signs of arcing- IE: No flashes of light, or jumping of the tuning position.) -Eric From booth at snf.stanford.edu Mon Apr 15 07:55:39 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 15, 2002 7:55:39 AM Subject: Shutdown stsetch 2002-04-13 00:06:04: Coil Matching NW noise Message-ID: did O2 clean on dummy wafer & it looks OK. From booth at snf.stanford.edu Mon Apr 15 07:56:03 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 15, 2002 7:56:03 AM Subject: Problem stsetch 2002-04-12 23:19:48: STS interlock tripped Message-ID: could not duplicate symptom. From jdas at snf.stanford.edu Mon Apr 15 11:54:15 2002 From: jdas at snf.stanford.edu (jdas at snf.stanford.edu) Date: Apr 15, 2002 11:54:15 AM Subject: Problem stsetch 2002-04-15 11:54:15: ICP proc ISO1 failed Message-ID: Non-uniform plasma switching From leeb at snf.stanford.edu Mon Apr 15 03:09:44 2002 From: leeb at snf.stanford.edu (leeb at snf.stanford.edu) Date: Apr 15, 2002 3:09:44 PM Subject: Problem stsetch 2002-04-15 15:09:44: sts plasma won't stay lit Message-ID: STS etcher has a problem keeping the plasma lit (DEEP). Tool runs for about 1 min then shuts off. When plasma initially lites there is a crackling noise coming from the chamber. From mcconnel at snf.stanford.edu Mon Apr 15 05:19:08 2002 From: mcconnel at snf.stanford.edu (mcconnel at snf.stanford.edu) Date: Apr 15, 2002 5:19:08 PM Subject: Shutdown stsetch 2002-04-15 17:19:07: arcing at start of etch cycle Message-ID: Arcing occurred (distinct snapping sounds) as the plasma was switching from "passivate" to "etch" mode. Twice the error message "#0795 interlock error" also appeared, which shut off the plasma and ended the process. Three of us were there as this was happening, and we all agreed that the snapping noises weren't normal. From booth at snf.stanford.edu Wed Apr 17 08:11:44 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 17, 2002 8:11:44 AM Subject: Problem stsetch 2002-04-15 15:09:44: sts plasma won't stay lit Message-ID: From booth at snf.stanford.edu Wed Apr 17 08:11:48 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 17, 2002 8:11:48 AM Subject: Problem stsetch 2002-04-15 11:54:15: ICP proc ISO1 failed Message-ID: From latta at snf.stanford.edu Wed Apr 17 12:11:30 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Apr 17, 2002 12:11:30 PM Subject: Shutdown stsetch 2002-04-15 17:19:07: arcing at start of etch cycle Message-ID: Air gap replaced. Etch rate test done; Flat = 2.2um/min Top = 2.5 Center = 2.1 Rt = 2.2 Lt = 2.2 About right. Released to users. From latta at snf.stanford.edu Wed Apr 17 12:11:33 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Apr 17, 2002 12:11:33 PM Subject: Shutdown stsetch 2002-04-15 17:19:07: arcing at start of etch cycle Message-ID: Air gap replaced. Etch rate test done; Flat = 2.2um/min Top = 2.5 Center = 2.1 Rt = 2.2 Lt = 2.2 About right. Released to users. From mcconnel at snf.stanford.edu Wed Apr 17 09:08:10 2002 From: mcconnel at snf.stanford.edu (mcconnel at snf.stanford.edu) Date: Apr 17, 2002 9:08:10 PM Subject: Shutdown stsetch 2002-04-17 21:08:09: wafer stuck in machine Message-ID: One of my wafers is stuck inside the machine. As it was loading, it slipped out of position in the loading tray right as it was going out of sight (too late to abort). The wafer is currently inside the machine, sitting more or less half on and half off of the etching chuck. I didn't want to risk unloading the wafer not knowing what would happen to it or the machine. From cbaxter at snf.stanford.edu Wed Apr 17 09:44:56 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 17, 2002 9:44:56 PM Subject: Shutdown stsetch 2002-04-17 21:08:09: wafer stuck in machine Message-ID: removed wafer. From jdas at snf.stanford.edu Wed Apr 24 01:43:46 2002 From: jdas at snf.stanford.edu (jdas at snf.stanford.edu) Date: Apr 24, 2002 1:43:46 PM Subject: Shutdown stsetch 2002-04-24 13:43:44: broken wafer inside Message-ID: From cbaxter at snf.stanford.edu Wed Apr 24 05:18:50 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 24, 2002 5:18:50 PM Subject: Shutdown stsetch 2002-04-24 13:43:44: broken wafer inside Message-ID: vented chamber and vacuum broken wafer chips. wipe down chamber with ipa and water. From latta at snf.stanford.edu Mon Apr 29 12:22:14 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Apr 29, 2002 12:22:14 PM Subject: Shutdown stsetch 2002-04-29 12:22:13: Oil to be added. Message-ID: From booth at snf.stanford.edu Mon Apr 29 01:32:10 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 29, 2002 1:32:10 PM Subject: Shutdown stsetch 2002-04-29 12:22:13: Oil to be added. Message-ID: finished pump maintenance.