April 2002 Archives by author

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Starting: Wed Apr 3 01:11:24 PST 2002
Ending: Mon Apr 29 12:22:14 PDT 2002
Messages: 19

• Interlock tripped error- cleared   Eric Perozziello
• Shutdown stsetch 2002-04-13 00:06:04: Coil Matching NW noise   booth at snf.stanford.edu
• Problem stsetch 2002-04-12 23:19:48: STS interlock tripped   booth at snf.stanford.edu
• Problem stsetch 2002-04-15 15:09:44: sts plasma won't stay lit   booth at snf.stanford.edu
• Problem stsetch 2002-04-15 11:54:15: ICP proc ISO1 failed   booth at snf.stanford.edu
• Shutdown stsetch 2002-04-29 12:22:13: Oil to be added.   booth at snf.stanford.edu
• Problem stsetch 2002-04-12 23:19:48: STS interlock tripped   bwacker at snf.stanford.edu
• Shutdown stsetch 2002-04-17 21:08:09: wafer stuck in machine   cbaxter at snf.stanford.edu
• Shutdown stsetch 2002-04-24 13:43:44: broken wafer inside   cbaxter at snf.stanford.edu
• Shutdown stsetch 2002-04-13 00:06:04: Coil Matching NW noise   ericp at snf.stanford.edu
• Problem stsetch 2002-04-15 11:54:15: ICP proc ISO1 failed   jdas at snf.stanford.edu
• Shutdown stsetch 2002-04-24 13:43:44: broken wafer inside   jdas at snf.stanford.edu
• Problem stsetch 2002-03-20 12:32:09: Load lock pumping down slowwwly.   latta at snf.stanford.edu
• Shutdown stsetch 2002-04-15 17:19:07: arcing at start of etch cycle   latta at snf.stanford.edu
• Shutdown stsetch 2002-04-15 17:19:07: arcing at start of etch cycle   latta at snf.stanford.edu
• Shutdown stsetch 2002-04-29 12:22:13: Oil to be added.   latta at snf.stanford.edu
• Problem stsetch 2002-04-15 15:09:44: sts plasma won't stay lit   leeb at snf.stanford.edu
• Shutdown stsetch 2002-04-15 17:19:07: arcing at start of etch cycle   mcconnel at snf.stanford.edu
• Shutdown stsetch 2002-04-17 21:08:09: wafer stuck in machine   mcconnel at snf.stanford.edu

Last message date: Mon Apr 29 12:22:14 PDT 2002
Archived on: Fri Jan 11 13:11:09 PST 2013

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