From jnee at snf.stanford.edu Fri Aug 2 11:45:38 2002 From: jnee at snf.stanford.edu (jnee at snf.stanford.edu) Date: Aug 2, 2002 11:45:38 PM Subject: Problem stsetch 2002-08-02 23:45:36: He flow fluctuates between 2.55 & 2.80 Message-ID: He pressure fluctuates between 9.9 and 9.98 From latta at snf.stanford.edu Mon Aug 5 03:31:44 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Aug 5, 2002 3:31:44 PM Subject: Problem stsetch 2002-08-02 23:45:36: He flow fluctuates between 2.55 & 2.80 Message-ID: Probably ok. From lwpan at snf.stanford.edu Mon Aug 12 06:47:05 2002 From: lwpan at snf.stanford.edu (lwpan at snf.stanford.edu) Date: Aug 12, 2002 6:47:05 PM Subject: Problem stsetch 2002-08-12 18:47:04: Communication problem Message-ID: A warning message showing "Operator Communication time out error" and the processing timer stopped during the process. From cbaxter at snf.stanford.edu Mon Aug 12 08:20:49 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 12, 2002 8:20:49 PM Subject: Problem stsetch 2002-08-12 18:47:04: Communication problem Message-ID: reboot system and tool is communicating again. From booth at snf.stanford.edu Thu Aug 15 07:22:02 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 15, 2002 7:22:02 AM Subject: Shutdown stsetch 2002-08-15 07:22:01: pump maintenance Message-ID: From booth at snf.stanford.edu Thu Aug 15 08:15:19 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 15, 2002 8:15:19 AM Subject: Shutdown stsetch 2002-08-15 07:22:01: pump maintenance Message-ID: added fomblin to dry pump gear box. From booth at snf.stanford.edu Fri Aug 16 06:35:51 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 16, 2002 6:35:51 AM Subject: Shutdown stsetch 2002-08-16 06:35:50: check gas in F-318 bottle Message-ID: From booth at snf.stanford.edu Fri Aug 16 07:15:20 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 16, 2002 7:15:20 AM Subject: Shutdown stsetch 2002-08-16 06:35:50: check gas in F-318 bottle Message-ID: checked F-318 & SF6 bottle le vels, From harshal at snf.stanford.edu Wed Aug 21 10:04:22 2002 From: harshal at snf.stanford.edu (harshal at snf.stanford.edu) Date: Aug 21, 2002 10:04:22 AM Subject: Shutdown stsetch 2002-08-21 10:04:21: broken wafer piece in etch chamber Message-ID: From booth at snf.stanford.edu Wed Aug 21 11:49:13 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 21, 2002 11:49:13 AM Subject: Shutdown stsetch 2002-08-21 10:04:21: broken wafer piece in etch chamber Message-ID: opened etch chamber & cleaned up broken wafer pieces. Cannot restart machine, turbo pump is making very unpleasant sounds as it tries to start spinning. From booth at snf.stanford.edu Wed Aug 21 11:49:49 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 21, 2002 11:49:49 AM Subject: Shutdown stsetch 2002-08-21 11:49:49: Turbo Pump may have failed. Message-ID: From booth at snf.stanford.edu Fri Aug 23 01:01:45 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 23, 2002 1:01:45 PM Subject: Shutdown stsetch 2002-08-21 11:49:49: Turbo Pump may have failed. Message-ID: rebuilt Turbo pump is alive & running normally. Muhammad ran a 30 min O2 clean for me. System needs to be seasoned, before using for regular etch process. From rcrane at snf.stanford.edu Fri Aug 23 01:10:23 2002 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Aug 23, 2002 1:10:23 PM Subject: Shutdown stsetch 2002-08-23 13:10:21: test and bottle change Message-ID: From rcrane at snf.stanford.edu Fri Aug 23 01:24:33 2002 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Aug 23, 2002 1:24:33 PM Subject: Shutdown stsetch 2002-08-23 13:10:21: test and bottle change Message-ID: test complete, bottle change complete From wittbrod at snf.stanford.edu Tue Aug 27 06:37:22 2002 From: wittbrod at snf.stanford.edu (wittbrod at snf.stanford.edu) Date: Aug 27, 2002 6:37:22 PM Subject: Problem stsetch 2002-08-27 18:37:21: during etching I observed that the color during the passivation cycle suddenly changed to a bright color (green?) after stopping the process I examined my wafer and noticed during that short time my r Message-ID: From latta at snf.stanford.edu Thu Aug 29 09:52:20 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Aug 29, 2002 9:52:20 AM Subject: Problem stsetch 2002-08-27 18:37:21: during etching I observed that the color during the passivation cycle suddenly changed to a bright color (green?) after stopping the process I examined my wafer and noticed during that short time my r Message-ID: Not sure what this is about, but subsequent users did not ovbserve the same color change. I know this fellow is using polyimide. Perhaps that is the reason? From mislam at snf.stanford.edu Sat Aug 31 10:37:20 2002 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Aug 31, 2002 10:37:20 AM Subject: Problem stsetch 2002-08-31 10:37:18: can't edit recipe Message-ID: Recipe editor gives the following error when trying to change process time "General Protection Fault....." Could not change process time. Computer probably need to be rebooted. Previous user set time to 10:00:00. This time my be too long for the system. From ericp at snf.stanford.edu Sat Aug 31 07:50:34 2002 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Aug 31, 2002 7:50:34 PM Subject: Problem stsetch 2002-08-31 19:50:34: Recipie Edit ok now Message-ID: The problem reported earlier by mislam has been fixed. Recipies can be edited fine. -Eric