From zappe at snf.stanford.edu Sun Dec 1 11:12:02 2002 From: zappe at snf.stanford.edu (zappe at snf.stanford.edu) Date: Dec 1, 2002 11:12:02 AM Subject: Problem stsetch 2002-12-01 11:12:02: ICP NOT AVAILABLE ALARM Message-ID: PROCESS WON'T START AND ALARM MESSAGE POPS UP, MACHINE RETURNS TO STANDBY From zappe at snf.stanford.edu Sun Dec 1 05:08:54 2002 From: zappe at snf.stanford.edu (zappe at snf.stanford.edu) Date: Dec 1, 2002 5:08:54 PM Subject: Problem stsetch 2002-12-01 17:08:53: windows error terminates user program Message-ID: I tried to start again since a user told me that I probably just have to start the process a couple of times in a row. It didn't work out. I tried to switch from process DEEP to FASTDEEP and when I tried to look at the recipe the Windows module error occurred and the user program was shut down. My wafer is still inside the machine. From zappe at snf.stanford.edu Sun Dec 1 06:07:12 2002 From: zappe at snf.stanford.edu (zappe at snf.stanford.edu) Date: Dec 1, 2002 6:07:12 PM Subject: Shutdown stsetch 2002-12-01 18:07:11: program not runnning, wafer still in chamber Message-ID: From ericp at snf.stanford.edu Sun Dec 1 08:02:53 2002 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Dec 1, 2002 8:02:53 PM Subject: Problem stsetch 2002-12-01 20:02:51: STSetch running ok now Message-ID: STS etcher is running fine now after software restart, but machine has been shutdown and there's no way for me to remove the shutdown. "dummy" wafer is "stuck" in the chamber until the shutdown is cleared. (not possible to unload without enabling). -Eric From booth at snf.stanford.edu Mon Dec 2 06:49:23 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Dec 2, 2002 6:49:23 AM Subject: Problem stsetch 2002-12-01 11:12:02: ICP NOT AVAILABLE ALARM Message-ID: From booth at snf.stanford.edu Mon Dec 2 06:49:27 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Dec 2, 2002 6:49:27 AM Subject: Problem stsetch 2002-12-01 20:02:51: STSetch running ok now Message-ID: From booth at snf.stanford.edu Mon Dec 2 06:49:33 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Dec 2, 2002 6:49:33 AM Subject: Problem stsetch 2002-12-01 17:08:53: windows error terminates user program Message-ID: From booth at snf.stanford.edu Mon Dec 2 06:49:57 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Dec 2, 2002 6:49:57 AM Subject: Shutdown stsetch 2002-12-01 18:07:11: program not runnning, wafer still in chamber Message-ID: system restarteda by ericp. From harshal at snf.stanford.edu Wed Dec 11 01:41:45 2002 From: harshal at snf.stanford.edu (harshal at snf.stanford.edu) Date: Dec 11, 2002 1:41:45 PM Subject: Problem stsetch 2002-12-11 13:41:44: broken wafer piece in STS etch chamber. Message-ID: i was etching my wafer and after unloaded it, found that a small piece of device wafer remained on the chuck. From harshal at snf.stanford.edu Wed Dec 11 01:46:49 2002 From: harshal at snf.stanford.edu (harshal at snf.stanford.edu) Date: Dec 11, 2002 1:46:49 PM Subject: Shutdown stsetch 2002-12-11 13:46:48: a small broken wafer piece on process chamber chuck. Message-ID: From cbaxter at snf.stanford.edu Wed Dec 11 07:17:42 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Dec 11, 2002 7:17:42 PM Subject: Shutdown stsetch 2002-12-11 13:46:48: a small broken wafer piece on process chamber chuck. Message-ID: vented chamber vacuum out wafer chips From cbaxter at snf.stanford.edu Wed Dec 11 07:17:47 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Dec 11, 2002 7:17:47 PM Subject: Problem stsetch 2002-12-11 13:41:44: broken wafer piece in STS etch chamber. Message-ID: From utkan at snf.stanford.edu Mon Dec 16 06:56:59 2002 From: utkan at snf.stanford.edu (utkan at snf.stanford.edu) Date: Dec 16, 2002 6:56:59 AM Subject: Shutdown stsetch 2002-12-16 06:56:58: software crush Message-ID: software crushed . application closed. From booth at snf.stanford.edu Mon Dec 16 06:58:42 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Dec 16, 2002 6:58:42 AM Subject: Shutdown stsetch 2002-12-16 06:56:58: software crush Message-ID: checked system, looks like software fault only. Restarted system software. From bchu at snf.stanford.edu Wed Dec 18 03:25:18 2002 From: bchu at snf.stanford.edu (bchu at snf.stanford.edu) Date: Dec 18, 2002 3:25:18 PM Subject: Problem stsetch 2002-12-18 15:25:18: sts Message-ID: there are fragments of si wafers inside the chamber. From bchu at snf.stanford.edu Wed Dec 18 03:30:14 2002 From: bchu at snf.stanford.edu (bchu at snf.stanford.edu) Date: Dec 18, 2002 3:30:14 PM Subject: Problem stsetch 2002-12-18 15:30:11: broken wafers inside Message-ID: From latta at snf.stanford.edu Wed Dec 18 04:19:18 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Dec 18, 2002 4:19:18 PM Subject: Shutdown stsetch 2002-12-18 16:19:17: Bill meant a shutdown, not problem Message-ID: From cbaxter at snf.stanford.edu Wed Dec 18 05:35:42 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Dec 18, 2002 5:35:42 PM Subject: Shutdown stsetch 2002-12-18 16:19:17: Bill meant a shutdown, not problem Message-ID: clean out broken wafer chips and ran o2 clean plasma From cbaxter at snf.stanford.edu Wed Dec 18 05:35:46 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Dec 18, 2002 5:35:46 PM Subject: Problem stsetch 2002-12-18 15:30:11: broken wafers inside Message-ID: From cbaxter at snf.stanford.edu Wed Dec 18 05:35:51 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Dec 18, 2002 5:35:51 PM Subject: Problem stsetch 2002-12-18 15:25:18: sts Message-ID: From utkan at snf.stanford.edu Fri Dec 20 02:39:45 2002 From: utkan at snf.stanford.edu (utkan at snf.stanford.edu) Date: Dec 20, 2002 2:39:45 PM Subject: Shutdown stsetch 2002-12-20 14:39:44: turbo does not match problem Message-ID: