Problem stsetch 2002-12-01 17:08:53: windows error terminates user program

[zappe at snf.stanford.edu]

I tried to start again since a user told me that I probably just have to start the process a couple of times in a row. It didn't work out. I tried to switch from process DEEP to FASTDEEP and when I tried to look at the recipe the Windows module error occurred and the user program was shut down.
My wafer is still inside the machine.