Problem stsetch 2002-12-01 20:02:51: STSetch running ok now

ericp at ericp at
Sun Dec 1 08:02:53 PST 2002

STS etcher is running fine now after software 
restart, but machine has been shutdown and there's 
no way for me to remove the shutdown.  
"dummy" wafer is "stuck" in the chamber until 
the shutdown is cleared. (not possible to unload
without enabling). 

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