Problem stsetch 2002-12-01 20:02:51: STSetch running ok now

ericp at snf.stanford.edu ericp at snf.stanford.edu
Sun Dec 1 08:02:53 PST 2002


STS etcher is running fine now after software 
restart, but machine has been shutdown and there's 
no way for me to remove the shutdown.  
"dummy" wafer is "stuck" in the chamber until 
the shutdown is cleared. (not possible to unload
without enabling). 
-Eric
  




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