Shutdown stsetch 2002-12-01 18:07:11: program not runnning, wafer still in chamber
booth at snf.stanford.edu
booth at snf.stanford.edu
Mon Dec 2 06:49:57 PST 2002
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Shutdown stsetch 2002-12-01 18:07:11: program not runnning, wafer still in chamber
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Problem stsetch 2002-12-01 20:02:51: STSetch running ok now
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system restarteda by ericp.
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Shutdown stsetch 2002-12-01 18:07:11: program not runnning, wafer still in chamber
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Problem stsetch 2002-12-01 20:02:51: STSetch running ok now
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