Problem stsetch 2002-12-11 13:41:44: broken wafer piece in STS etch chamber.

harshal at snf.stanford.edu harshal at snf.stanford.edu
Wed Dec 11 01:41:45 PST 2002


i was etching my wafer and after unloaded it, found that a small piece of device wafer remained on the chuck.  




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