Problem stsetch 2002-12-11 13:41:44: broken wafer piece in STS etch chamber.
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Wed Dec 11 07:17:47 PST 2002
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Problem stsetch 2002-12-11 13:41:44: broken wafer piece in STS etch chamber.
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Shutdown stsetch 2002-12-11 13:46:48: a small broken wafer piece on process chamber chuck.
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Problem stsetch 2002-12-11 13:41:44: broken wafer piece in STS etch chamber.
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Shutdown stsetch 2002-12-11 13:46:48: a small broken wafer piece on process chamber chuck.
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