Shutdown stsetch 2002-12-16 06:56:58: software crush
utkan at snf.stanford.edu
utkan at snf.stanford.edu
Mon Dec 16 06:56:59 PST 2002
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Shutdown stsetch 2002-12-11 13:46:48: a small broken wafer piece on process chamber chuck.
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Shutdown stsetch 2002-12-16 06:56:58: software crush
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software crushed . application closed.
Previous message:
Shutdown stsetch 2002-12-11 13:46:48: a small broken wafer piece on process chamber chuck.
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Shutdown stsetch 2002-12-16 06:56:58: software crush
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