December 2002 Archives by author

• Messages sorted by: [ thread ] [ subject ] [ date ]
• More info on this list...

Starting: Sun Dec 1 05:08:54 PST 2002
Ending: Fri Dec 20 02:39:45 PST 2002
Messages: 21

• Problem stsetch 2002-12-18 15:25:18: sts   bchu at snf.stanford.edu
• Problem stsetch 2002-12-18 15:30:11: broken wafers inside   bchu at snf.stanford.edu
• Problem stsetch 2002-12-01 11:12:02: ICP NOT AVAILABLE ALARM   booth at snf.stanford.edu
• Problem stsetch 2002-12-01 20:02:51: STSetch running ok now   booth at snf.stanford.edu
• Problem stsetch 2002-12-01 17:08:53: windows error terminates user program   booth at snf.stanford.edu
• Shutdown stsetch 2002-12-01 18:07:11: program not runnning, wafer still in chamber   booth at snf.stanford.edu
• Shutdown stsetch 2002-12-16 06:56:58: software crush   booth at snf.stanford.edu
• Shutdown stsetch 2002-12-11 13:46:48: a small broken wafer piece on process chamber chuck.   cbaxter at snf.stanford.edu
• Problem stsetch 2002-12-11 13:41:44: broken wafer piece in STS etch chamber.   cbaxter at snf.stanford.edu
• Shutdown stsetch 2002-12-18 16:19:17: Bill meant a shutdown, not problem   cbaxter at snf.stanford.edu
• Problem stsetch 2002-12-18 15:30:11: broken wafers inside   cbaxter at snf.stanford.edu
• Problem stsetch 2002-12-18 15:25:18: sts   cbaxter at snf.stanford.edu
• Problem stsetch 2002-12-01 20:02:51: STSetch running ok now   ericp at snf.stanford.edu
• Problem stsetch 2002-12-11 13:41:44: broken wafer piece in STS etch chamber.   harshal at snf.stanford.edu
• Shutdown stsetch 2002-12-11 13:46:48: a small broken wafer piece on process chamber chuck.   harshal at snf.stanford.edu
• Shutdown stsetch 2002-12-18 16:19:17: Bill meant a shutdown, not problem   latta at snf.stanford.edu
• Shutdown stsetch 2002-12-16 06:56:58: software crush   utkan at snf.stanford.edu
• Shutdown stsetch 2002-12-20 14:39:44: turbo does not match problem   utkan at snf.stanford.edu
• Problem stsetch 2002-12-01 17:08:53: windows error terminates user program   zappe at snf.stanford.edu
• Shutdown stsetch 2002-12-01 18:07:11: program not runnning, wafer still in chamber   zappe at snf.stanford.edu
• Problem stsetch 2002-12-01 11:12:02: ICP NOT AVAILABLE ALARM   zappe at snf.stanford.edu

Last message date: Fri Dec 20 02:39:45 PST 2002
Archived on: Fri Jan 11 13:11:10 PST 2013

• Messages sorted by: [ thread ] [ subject ] [ date ]
• More info on this list...