From ericp at snf.stanford.edu Mon Feb 4 12:03:52 2002 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Feb 4, 2002 12:03:52 AM Subject: Problem stsetch 2002-02-04 00:03:50: load robot stepper is sick. Message-ID: On load and unload, the motor whines, and arm movement is slllllooooooooooooowwwwww. Machine crashed (normal turbo failure) while unloading another user's wafer- AaronP reset it. Perhaps the unload timed out and triggered the mysterious but familiar failure? From ericp at snf.stanford.edu Mon Feb 4 01:53:26 2002 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Feb 4, 2002 1:53:26 AM Subject: Shutdown stsetch 2002-02-04 01:53:25: Communications failure on unload Message-ID: On unloading, system gives communication error "waiting for handler". Wafer left in chamber. From booth at snf.stanford.edu Mon Feb 4 06:51:56 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Feb 4, 2002 6:51:56 AM Subject: Shutdown stsetch 2002-02-04 01:53:25: Communications failure on unload Message-ID: restarted system software unloaded EricP wafer & put in storage box From booth at snf.stanford.edu Mon Feb 4 06:52:32 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Feb 4, 2002 6:52:32 AM Subject: Problem stsetch 2002-02-04 00:03:50: load robot stepper is sick. Message-ID: loading arm is working normally after restarting system software. From ycfu at snf.stanford.edu Tue Feb 5 07:54:13 2002 From: ycfu at snf.stanford.edu (ycfu at snf.stanford.edu) Date: Feb 5, 2002 7:54:13 AM Subject: Problem stsetch 2002-02-05 07:54:12: STSetch helium back side pressure unstable Message-ID: From booth at snf.stanford.edu Tue Feb 5 09:07:51 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Feb 5, 2002 9:07:51 AM Subject: Problem stsetch 2002-02-05 07:54:12: STSetch helium back side pressure unstable Message-ID: Restarted system software. Had user ycfu remove his wafer from etch chamber. wafer had something on backside, in area of He seal. Had him clean alum. carrier & load dummy wafer, He pressure was stable. I think his wafer was the problem. From yangxu at snf.stanford.edu Wed Feb 6 11:22:36 2002 From: yangxu at snf.stanford.edu (yangxu at snf.stanford.edu) Date: Feb 6, 2002 11:22:36 PM Subject: Problem stsetch 2002-02-06 23:22:34: Wafer is still in the chamber Message-ID: Because of toxic gas alarm, one wafer is still inside the chamber. From cbaxter at snf.stanford.edu Wed Feb 6 11:32:21 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 6, 2002 11:32:21 PM Subject: Problem stsetch 2002-02-06 23:22:34: Wafer is still in the chamber Message-ID: unload wafer from and place it in a wafer box From yangxu at snf.stanford.edu Thu Feb 7 12:01:44 2002 From: yangxu at snf.stanford.edu (yangxu at snf.stanford.edu) Date: Feb 7, 2002 12:01:44 AM Subject: Problem stsetch 2002-02-07 00:01:43: wafer still inside chamber Message-ID: Because of toxic gas alarm, wafer is left inside the chamber From latta at snf.stanford.edu Thu Feb 7 09:49:09 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Feb 7, 2002 9:49:09 AM Subject: Problem stsetch 2002-02-07 00:01:43: wafer still inside chamber Message-ID: Wafer removed. From latta at snf.stanford.edu Thu Feb 7 11:12:11 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Feb 7, 2002 11:12:11 AM Subject: Problem stsetch 2002-02-07 11:12:10: Chamber pressures creeping up Message-ID: SMOODEEP program was at 40, now is about 45mT From cbaxter at snf.stanford.edu Thu Feb 7 10:11:23 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 7, 2002 10:11:23 PM Subject: Problem stsetch 2002-02-07 11:12:10: Chamber pressures creeping up Message-ID: I cleaned the throttle valve is pressure is better, it control between 38 to 40 m/t. will schedule the foreline clean again when tool has some free time. From disney at snf.stanford.edu Fri Feb 8 01:45:33 2002 From: disney at snf.stanford.edu (disney at snf.stanford.edu) Date: Feb 8, 2002 1:45:33 PM Subject: Shutdown stsetch 2002-02-08 13:45:32: broken wafer in chamber Message-ID: Wafer transfer function got confused and thought there was a wafer in the chamber. It took my new wafer into the chamber and broke it while trying to unload the nonexistent wafer. From latta at snf.stanford.edu Fri Feb 8 01:45:52 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Feb 8, 2002 1:45:52 PM Subject: Shutdown stsetch 2002-02-08 13:45:49: Wafer broken in Chamber Message-ID: Sorry, Folks, this one is my fault. I was doing the recovery from software lock up and did not notice the machine sensed a wafer in the chamber which wasn't really there. So it tried to load another wafer onto the already occupied chuck- many pieces.... From cbaxter at snf.stanford.edu Fri Feb 8 06:44:24 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 8, 2002 6:44:24 PM Subject: Shutdown stsetch 2002-02-08 13:45:49: Wafer broken in Chamber Message-ID: cleaned up broken wafer From cbaxter at snf.stanford.edu Fri Feb 8 06:44:46 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 8, 2002 6:44:46 PM Subject: Shutdown stsetch 2002-02-08 13:45:32: broken wafer in chamber Message-ID: cleaned up broken wafer From ycfu at snf.stanford.edu Sat Feb 9 11:18:02 2002 From: ycfu at snf.stanford.edu (ycfu at snf.stanford.edu) Date: Feb 9, 2002 11:18:02 AM Subject: Problem stsetch 2002-02-09 11:17:59: back side helium pressure too low Message-ID: From zhang at snf.stanford.edu Sat Feb 9 11:10:04 2002 From: zhang at snf.stanford.edu (zhang at snf.stanford.edu) Date: Feb 9, 2002 11:10:04 PM Subject: Shutdown stsetch 2002-02-09 23:10:02: wafer broken during unloading Message-ID: 90min DEEP process. Everything normal during process. Wafer still intact at the last few seconds of etching, but did not come out of chamber during unloading. From cbaxter at snf.stanford.edu Mon Feb 11 04:41:43 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 11, 2002 4:41:43 PM Subject: Shutdown stsetch 2002-02-09 23:10:02: wafer broken during unloading Message-ID: removed broken pieces of wafer chips From cbaxter at snf.stanford.edu Mon Feb 11 04:41:50 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 11, 2002 4:41:50 PM Subject: Problem stsetch 2002-02-09 11:17:59: back side helium pressure too low Message-ID: From yangxu at snf.stanford.edu Tue Feb 12 08:38:59 2002 From: yangxu at snf.stanford.edu (yangxu at snf.stanford.edu) Date: Feb 12, 2002 8:38:59 AM Subject: Shutdown stsetch 2002-02-12 08:38:58: load lock could not pump down Message-ID: the load lock could not pump down while the etching was still going. Then it happened again when Infoco was not set to OFF and the vent was clicked From booth at snf.stanford.edu Tue Feb 12 08:58:27 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Feb 12, 2002 8:58:27 AM Subject: Shutdown stsetch 2002-02-12 08:38:58: load lock could not pump down Message-ID: restarted system software. From mnepo at snf.stanford.edu Tue Feb 12 10:36:27 2002 From: mnepo at snf.stanford.edu (mnepo at snf.stanford.edu) Date: Feb 12, 2002 10:36:27 AM Subject: Problem stsetch 2002-02-12 10:36:24: sts etch Message-ID: lock excessive gate open time alarm. From mnepo at snf.stanford.edu Tue Feb 12 12:53:08 2002 From: mnepo at snf.stanford.edu (mnepo at snf.stanford.edu) Date: Feb 12, 2002 12:53:08 PM Subject: Shutdown stsetch 2002-02-12 12:53:06: pump down time alarm Message-ID: From latta at snf.stanford.edu Tue Feb 12 01:20:10 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Feb 12, 2002 1:20:10 PM Subject: Shutdown stsetch 2002-02-12 12:53:06: pump down time alarm Message-ID: Software lock up- happening with more frequency today... From latta at snf.stanford.edu Tue Feb 12 01:20:29 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Feb 12, 2002 1:20:29 PM Subject: Problem stsetch 2002-02-12 10:36:24: sts etch Message-ID: Been clearing the software lock ups. From hansen at snf.stanford.edu Wed Feb 13 07:15:06 2002 From: hansen at snf.stanford.edu (hansen at snf.stanford.edu) Date: Feb 13, 2002 7:15:06 AM Subject: Shutdown stsetch 2002-02-13 07:15:03: Lock chamber won't pump down Message-ID: Lock chamber won't pump down on wafer unload. From booth at snf.stanford.edu Wed Feb 13 07:19:52 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Feb 13, 2002 7:19:52 AM Subject: Shutdown stsetch 2002-02-13 07:15:03: Lock chamber won't pump down Message-ID: restarted system software. From hansen at snf.stanford.edu Wed Feb 13 07:57:47 2002 From: hansen at snf.stanford.edu (hansen at snf.stanford.edu) Date: Feb 13, 2002 7:57:47 AM Subject: Shutdown stsetch 2002-02-13 07:57:46: lock chamber won't pump down Message-ID: Lock chamber won't pump down on wafer unload. My wafer is still inside. -Sean Hansen From booth at snf.stanford.edu Wed Feb 13 08:10:18 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Feb 13, 2002 8:10:18 AM Subject: Shutdown stsetch 2002-02-13 07:57:46: lock chamber won't pump down Message-ID: restarted ;system software - OK again. From mnepo at snf.stanford.edu Wed Feb 13 09:28:48 2002 From: mnepo at snf.stanford.edu (mnepo at snf.stanford.edu) Date: Feb 13, 2002 9:28:48 AM Subject: Problem stsetch 2002-02-13 09:28:47: load lock vent problem Message-ID: From booth at snf.stanford.edu Wed Feb 13 09:37:02 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Feb 13, 2002 9:37:02 AM Subject: Problem stsetch 2002-02-13 09:28:47: load lock vent problem Message-ID: restarted system software. From qwang at snf.stanford.edu Wed Feb 13 11:38:01 2002 From: qwang at snf.stanford.edu (qwang at snf.stanford.edu) Date: Feb 13, 2002 11:38:01 AM Subject: Shutdown stsetch 2002-02-13 11:37:59: Message-ID: Can not unload wafer From booth at snf.stanford.edu Wed Feb 13 11:38:41 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Feb 13, 2002 11:38:41 AM Subject: Shutdown stsetch 2002-02-13 11:37:59: Message-ID: restarted system software. From ycfu at snf.stanford.edu Wed Feb 13 03:10:05 2002 From: ycfu at snf.stanford.edu (ycfu at snf.stanford.edu) Date: Feb 13, 2002 3:10:05 PM Subject: Shutdown stsetch 2002-02-13 15:10:03: venting problem Message-ID: From cbaxter at snf.stanford.edu Wed Feb 13 05:20:26 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 13, 2002 5:20:26 PM Subject: Shutdown stsetch 2002-02-13 15:10:03: venting problem Message-ID: installed two ground wires. one on the top cover and the second one on the side cover. system is ready From enwang at snf.stanford.edu Thu Feb 14 12:52:45 2002 From: enwang at snf.stanford.edu (enwang at snf.stanford.edu) Date: Feb 14, 2002 12:52:45 AM Subject: Problem stsetch 2002-02-14 00:52:44: cannot pump down to <180mT to vent Message-ID: From parco at snf.stanford.edu Thu Feb 14 05:37:35 2002 From: parco at snf.stanford.edu (parco at snf.stanford.edu) Date: Feb 14, 2002 5:37:35 AM Subject: Shutdown stsetch 2002-02-14 05:37:34: software not communicating to hardware Message-ID: len- at the beginning, everything seem to be normal as usual. ran an initial priming w/ oxide Si wafer to condition chamber and process recipe. the cycle was 30 min. with succes and no incident. cycle complete, unload success, but venting not successful. it states fault-"pump-out time exceeded" & alarm- "lock excessive pump down time alarm". chamber not vented completely and software communication lock -up, not allowing to proceed to the next or alternative step. From booth at snf.stanford.edu Thu Feb 14 09:33:00 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Feb 14, 2002 9:33:00 AM Subject: Problem stsetch 2002-02-14 00:52:44: cannot pump down to <180mT to vent Message-ID: software lockup From booth at snf.stanford.edu Thu Feb 14 09:35:54 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Feb 14, 2002 9:35:54 AM Subject: Shutdown stsetch 2002-02-14 05:37:34: software not communicating to hardware Message-ID: restarted system software Len broke wafer in chamber, 7 broke 1 clamp finger, opened chamber & loadlock, removed broken wafer, replaced broken clamp fingers, replaced chuck Helium lip seal. Ran 30 min O2 clean. Chamber will need to be seasoned. From disney at snf.stanford.edu Thu Feb 14 11:51:16 2002 From: disney at snf.stanford.edu (disney at snf.stanford.edu) Date: Feb 14, 2002 11:51:16 AM Subject: Shutdown stsetch 2002-02-14 11:51:16: Will not vent. My wafer is in load chamber. Message-ID: Error message "Lock excessive pump down time alarm" My first wafer vented in an abnormal manner. Started to vent, then pumped down, then finally vented. My second wafer finished etching and unloading, but will not vent. From latta at snf.stanford.edu Thu Feb 14 12:10:34 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Feb 14, 2002 12:10:34 PM Subject: Shutdown stsetch 2002-02-14 11:51:16: Will not vent. My wafer is in load chamber. Message-ID: Reset, yet again..... From disney at snf.stanford.edu Thu Feb 14 01:35:37 2002 From: disney at snf.stanford.edu (disney at snf.stanford.edu) Date: Feb 14, 2002 1:35:37 PM Subject: Shutdown stsetch 2002-02-14 13:35:36: wafer will not unload Message-ID: From booth at snf.stanford.edu Thu Feb 14 01:56:05 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Feb 14, 2002 1:56:05 PM Subject: Shutdown stsetch 2002-02-14 13:35:36: wafer will not unload Message-ID: restarted system software twice to vent loadlock & remove wafer. From percin at snf.stanford.edu Thu Feb 14 02:29:16 2002 From: percin at snf.stanford.edu (percin at snf.stanford.edu) Date: Feb 14, 2002 2:29:16 PM Subject: Problem stsetch 2002-02-14 14:29:16: Loading chamber is not venting... Message-ID: Wafer is successfully unloaded from process chamber, but the loading chamber did not get vented. From latta at snf.stanford.edu Thu Feb 14 03:13:45 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Feb 14, 2002 3:13:45 PM Subject: Problem stsetch 2002-02-14 14:29:16: Loading chamber is not venting.. Message-ID: Cleared it. From percin at snf.stanford.edu Thu Feb 14 03:23:08 2002 From: percin at snf.stanford.edu (percin at snf.stanford.edu) Date: Feb 14, 2002 3:23:08 PM Subject: Problem stsetch 2002-02-14 15:23:06: Second time: Load chamber is not venting.. Message-ID: Second time: Loading chamber is not venting. Unloading is fine tough. From latta at snf.stanford.edu Thu Feb 14 03:23:39 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Feb 14, 2002 3:23:39 PM Subject: Problem stsetch 2002-02-14 15:23:06: Second time: Load chamber is not venting.. Message-ID: Cleared again.... ain't this fun! From percin at snf.stanford.edu Thu Feb 14 03:29:43 2002 From: percin at snf.stanford.edu (percin at snf.stanford.edu) Date: Feb 14, 2002 3:29:43 PM Subject: Problem stsetch 2002-02-14 15:29:42: Lock excessive pump down time alarm during process Message-ID: Lock excessive pump down time alarm during etch process. Etching seems to be fine. From ycfu at snf.stanford.edu Thu Feb 14 06:03:11 2002 From: ycfu at snf.stanford.edu (ycfu at snf.stanford.edu) Date: Feb 14, 2002 6:03:11 PM Subject: Problem stsetch 2002-02-14 18:03:11: backside helium pressure not stable Message-ID: From cbaxter at snf.stanford.edu Thu Feb 14 06:20:04 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 14, 2002 6:20:04 PM Subject: Problem stsetch 2002-02-14 18:03:11: backside helium pressure not stable Message-ID: unload wafer and re-load again From ycfu at snf.stanford.edu Thu Feb 14 08:33:29 2002 From: ycfu at snf.stanford.edu (ycfu at snf.stanford.edu) Date: Feb 14, 2002 8:33:29 PM Subject: Problem stsetch 2002-02-14 20:33:29: cannot vent Message-ID: From cbaxter at snf.stanford.edu Thu Feb 14 09:09:27 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 14, 2002 9:09:27 PM Subject: Problem stsetch 2002-02-14 20:33:29: cannot vent Message-ID: re-boot tool.. From booth at snf.stanford.edu Fri Feb 15 06:23:15 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Feb 15, 2002 6:23:15 AM Subject: Problem stsetch 2002-02-14 15:29:42: Lock excessive pump down time alarm during process Message-ID: restarted system software. From zhang at snf.stanford.edu Fri Feb 15 12:20:52 2002 From: zhang at snf.stanford.edu (zhang at snf.stanford.edu) Date: Feb 15, 2002 12:20:52 PM Subject: Problem stsetch 2002-02-15 12:20:50: lock excessive pump down time alarm Message-ID: From latta at snf.stanford.edu Fri Feb 15 01:57:38 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Feb 15, 2002 1:57:38 PM Subject: Shutdown stsetch 2002-02-15 13:57:37: Computer fan dead. Message-ID: From cbaxter at snf.stanford.edu Fri Feb 15 03:37:45 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 15, 2002 3:37:45 PM Subject: Shutdown stsetch 2002-02-15 13:57:37: Computer fan dead. Message-ID: changed cooling fan... From cbaxter at snf.stanford.edu Fri Feb 15 03:37:49 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 15, 2002 3:37:49 PM Subject: Problem stsetch 2002-02-15 12:20:50: lock excessive pump down time alarm Message-ID: From ericp at snf.stanford.edu Fri Feb 15 10:09:31 2002 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Feb 15, 2002 10:09:31 PM Subject: Problem stsetch 2002-02-15 22:09:24: Loadlock gauge error Message-ID: Loadlock gauge indicates high pressure. Pirani gauge seems flakey- Sometimes it pumps just fine, sometimes it just stalls at a high pressure and times out. When high pressure is indicated, system is stuck. Can't vent, can't unload..... From yangxu at snf.stanford.edu Sun Feb 17 06:29:49 2002 From: yangxu at snf.stanford.edu (yangxu at snf.stanford.edu) Date: Feb 17, 2002 6:29:49 AM Subject: Shutdown stsetch 2002-02-17 06:29:48: user Zhang's wafer in etching chamber Message-ID: user Zhang's wafer was unable to unload From shott at snf.stanford.edu Sun Feb 17 03:26:42 2002 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Feb 17, 2002 3:26:42 PM Subject: Shutdown stsetch 2002-02-17 06:29:48: user Zhang's wafer in etching chamber Message-ID: Eric has restarted this. John From eap at gloworm.Stanford.EDU Sun Feb 17 17:52:26 2002 From: eap at gloworm.Stanford.EDU (Eric Perozziello) Date: Sun, 17 Feb 2002 17:52:26 -0800 (PST) Subject: Loadlock Gauge problem/observations possibly crash related Message-ID: <200202180152.RAA22043@gloworm.Stanford.EDU> Just a few extra details on the several problems this weekend: Crashes seem to be related to a loadlock pumpdown timeout error. The pressure in the loadlock drops, and then seems to hit some kind of "base" pressure which is above the required (~80mT) setpoint pressure for venting, loading, etc. The "base" pressure is usually different each time (from 120 mT to 700 mT). I can think of three possible causes of this: 1). pump problem 2). leak or 3). gauge error. Since it is intermittent, and sometimes pumps quite normally, and the leakup rate seems normal, 1&2 seem less likely. Also, I've seen it pump down to "good" base, then fail on a subsequent pumpdown with no actions that would create a leak inbetween. It seems as if the pirani CC gauge is giving a bad reading, but there is no other readout to verify this reading (There is a baratron on the loadlock, but I don't know where to read this). -Eric From zhang at snf.stanford.edu Sun Feb 17 10:32:27 2002 From: zhang at snf.stanford.edu (zhang at snf.stanford.edu) Date: Feb 17, 2002 10:32:27 PM Subject: Problem stsetch 2002-02-17 22:32:26: wafer stuck inside load chamber Message-ID: maximum pumpdown time exceeded alarm From booth at snf.stanford.edu Tue Feb 19 07:28:14 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Feb 19, 2002 7:28:14 AM Subject: Problem stsetch 2002-02-17 22:32:26: wafer stuck inside load chamber Message-ID: cleared by ericp? From booth at snf.stanford.edu Tue Feb 19 07:28:39 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Feb 19, 2002 7:28:39 AM Subject: Problem stsetch 2002-02-15 22:09:24: Loadlock gauge error Message-ID: this is probably not a cause. From ycfu at snf.stanford.edu Tue Feb 19 07:52:47 2002 From: ycfu at snf.stanford.edu (ycfu at snf.stanford.edu) Date: Feb 19, 2002 7:52:47 AM Subject: Shutdown stsetch 2002-02-19 07:52:45: cannot unload wafer Message-ID: From booth at snf.stanford.edu Tue Feb 19 07:55:19 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Feb 19, 2002 7:55:19 AM Subject: Shutdown stsetch 2002-02-19 07:52:45: cannot unload wafer Message-ID: restarted system software. From ycfu at snf.stanford.edu Tue Feb 19 08:56:18 2002 From: ycfu at snf.stanford.edu (ycfu at snf.stanford.edu) Date: Feb 19, 2002 8:56:18 AM Subject: Problem stsetch 2002-02-19 08:56:17: cannot unload wafer Message-ID: From ycfu at snf.stanford.edu Tue Feb 19 09:04:29 2002 From: ycfu at snf.stanford.edu (ycfu at snf.stanford.edu) Date: Feb 19, 2002 9:04:29 AM Subject: Shutdown stsetch 2002-02-19 09:04:28: cannot unload wafer Message-ID: From mnepo at snf.stanford.edu Tue Feb 19 09:48:12 2002 From: mnepo at snf.stanford.edu (mnepo at snf.stanford.edu) Date: Feb 19, 2002 9:48:12 AM Subject: Problem stsetch 2002-02-19 09:48:04: pump down problem Message-ID: From booth at snf.stanford.edu Tue Feb 19 09:52:57 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Feb 19, 2002 9:52:57 AM Subject: Shutdown stsetch 2002-02-19 09:04:28: cannot unload wafer Message-ID: restarted system software twice to get unload function to work. From booth at snf.stanford.edu Tue Feb 19 09:53:07 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Feb 19, 2002 9:53:07 AM Subject: Problem stsetch 2002-02-19 09:48:04: pump down problem Message-ID: From booth at snf.stanford.edu Tue Feb 19 09:53:10 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Feb 19, 2002 9:53:10 AM Subject: Problem stsetch 2002-02-19 08:56:17: cannot unload wafer Message-ID: From mnepo at snf.stanford.edu Tue Feb 19 10:00:45 2002 From: mnepo at snf.stanford.edu (mnepo at snf.stanford.edu) Date: Feb 19, 2002 10:00:45 AM Subject: Shutdown stsetch 2002-02-19 10:00:44: vent problem Message-ID: From booth at snf.stanford.edu Tue Feb 19 11:06:17 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Feb 19, 2002 11:06:17 AM Subject: Shutdown stsetch 2002-02-19 10:00:44: vent problem Message-ID: restarted system software. From davehong at snf.stanford.edu Tue Feb 19 11:23:34 2002 From: davehong at snf.stanford.edu (davehong at snf.stanford.edu) Date: Feb 19, 2002 11:23:34 AM Subject: Shutdown stsetch 2002-02-19 11:23:32: load chamber not pumping down Message-ID: From latta at snf.stanford.edu Tue Feb 19 12:11:35 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Feb 19, 2002 12:11:35 PM Subject: Shutdown stsetch 2002-02-19 11:23:32: load chamber not pumping down Message-ID: Reboot- wf removed. From booth at snf.stanford.edu Tue Feb 19 12:38:12 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Feb 19, 2002 12:38:12 PM Subject: Shutdown stsetch 2002-02-19 12:38:11: maintenance in progress. Message-ID: From cbaxter at snf.stanford.edu Tue Feb 19 07:49:39 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 19, 2002 7:49:39 PM Subject: Shutdown stsetch 2002-02-19 12:38:11: maintenance in progress. Message-ID: installed new upper body nupro valve and tested From pindermu at snf.stanford.edu Tue Feb 19 08:29:10 2002 From: pindermu at snf.stanford.edu (pindermu at snf.stanford.edu) Date: Feb 19, 2002 8:29:10 PM Subject: Shutdown stsetch 2002-02-19 20:29:04: excessive lock pumpdown time Message-ID: From pindermu at snf.stanford.edu Tue Feb 19 08:29:11 2002 From: pindermu at snf.stanford.edu (pindermu at snf.stanford.edu) Date: Feb 19, 2002 8:29:11 PM Subject: Shutdown stsetch 2002-02-19 20:29:04: excessive lock pumpdown time Message-ID: From cbaxter at snf.stanford.edu Tue Feb 19 10:54:38 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 19, 2002 10:54:38 PM Subject: Shutdown stsetch 2002-02-19 20:29:04: excessive lock pumpdown time Message-ID: second time around, found leak on arm end shaft seal oring ID is totally flat. Found replacement oring from drytek spare orings. From booth at snf.stanford.edu Fri Feb 22 07:00:48 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Feb 22, 2002 7:00:48 AM Subject: Shutdown stsetch 2002-02-22 07:00:47: Maintenance - F-318 bottle change. Message-ID: From booth at snf.stanford.edu Fri Feb 22 08:29:49 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Feb 22, 2002 8:29:49 AM Subject: Shutdown stsetch 2002-02-22 07:00:47: Maintenance - F-318 bottle change. Message-ID: Ray & Mike D installed new F-318 bottle. From zhang at snf.stanford.edu Sun Feb 24 10:12:37 2002 From: zhang at snf.stanford.edu (zhang at snf.stanford.edu) Date: Feb 24, 2002 10:12:37 AM Subject: Problem stsetch 2002-02-24 10:12:37: enable/disable display problem Message-ID: I came in this morning to use STSETCH and found it was already enabled under my login. It could not have been possible because the user after me yesterday was using it under his own login when I left. I looked up STSETCH HISTORY and found that the machine had been enabled under my login non-stop since 9am last Friday, whereas my actual login times were Friday 9am-3pm and Saturday 1pm-5pm. From leeb at snf.stanford.edu Tue Feb 26 06:07:02 2002 From: leeb at snf.stanford.edu (leeb at snf.stanford.edu) Date: Feb 26, 2002 6:07:02 PM Subject: Problem stsetch 2002-02-26 18:07:01: stsetch fault Message-ID: STS etcher gives an exceed pump down time error. System is unresponsive i.e. can not load chamber. From pindermu at snf.stanford.edu Tue Feb 26 07:25:54 2002 From: pindermu at snf.stanford.edu (pindermu at snf.stanford.edu) Date: Feb 26, 2002 7:25:54 PM Subject: Shutdown stsetch 2002-02-26 19:25:54: Load-lock arm sensor failure: wafer fell in chamber Message-ID: From cbaxter at snf.stanford.edu Wed Feb 27 05:46:19 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 27, 2002 5:46:19 PM Subject: Shutdown stsetch 2002-02-26 19:25:54: Load-lock arm sensor failure: wafer fell in chamber Message-ID: VENTED CHAMBER AND REMOVED WAFER CARRIER From cbaxter at snf.stanford.edu Wed Feb 27 05:46:27 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 27, 2002 5:46:27 PM Subject: Problem stsetch 2002-02-26 18:07:01: stsetch fault Message-ID: From cbaxter at snf.stanford.edu Wed Feb 27 05:46:32 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 27, 2002 5:46:32 PM Subject: Problem stsetch 2002-02-24 10:12:37: enable/disable display problem Message-ID: From kenney at snf.stanford.edu Thu Feb 28 03:50:22 2002 From: kenney at snf.stanford.edu (kenney at snf.stanford.edu) Date: Feb 28, 2002 3:50:22 AM Subject: Problem stsetch 2002-02-28 03:50:22: Finger sticking near flat Message-ID: When unloading my wafer one of the fingers near the wafer flat stuck briefly to the aluminum holder. This caused the holder and wafer to wobble. This may have been the cause of the misplaced wafer from Tuesday. Perhaps there's some resist on it? From cbaxter at snf.stanford.edu Thu Feb 28 07:00:51 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 28, 2002 7:00:51 PM Subject: Problem stsetch 2002-02-28 03:50:22: Finger sticking near flat Message-ID: vented chamber and cleaned all fingers