Problem stsetch 2002-02-04 00:03:50: load robot stepper is sick.

ericp at snf.stanford.edu ericp at snf.stanford.edu
Mon Feb 4 12:03:52 PST 2002


On load and unload, the motor whines, and 
arm movement is slllllooooooooooooowwwwww.
Machine crashed (normal turbo failure) while 
unloading another user's wafer-  AaronP reset it.
Perhaps the unload timed out and triggered the 
mysterious but familiar failure?  




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