Problem stsetch 2002-02-05 07:54:12: STSetch helium back side pressure unstable

[booth at snf.stanford.edu]

Restarted system software.
Had user ycfu remove his wafer from etch chamber.
wafer had something on backside, in area of He seal.
Had him clean alum. carrier & load dummy wafer,
He pressure was stable.  I think his wafer was the
problem.