Problem stsetch 2002-02-05 07:54:12: STSetch helium back side pressure unstable

booth at snf.stanford.edu booth at snf.stanford.edu
Tue Feb 5 09:07:51 PST 2002


Restarted system software.
Had user ycfu remove his wafer from etch chamber.
wafer had something on backside, in area of He seal.
Had him clean alum. carrier & load dummy wafer,
He pressure was stable.  I think his wafer was the
problem.




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