Problem stsetch 2002-02-06 23:22:34: Wafer is still in the chamber
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Wed Feb 6 11:32:21 PST 2002
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Problem stsetch 2002-02-06 23:22:34: Wafer is still in the chamber
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Problem stsetch 2002-02-07 11:12:10: Chamber pressures creeping up
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unload wafer from and place it in a wafer box
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Problem stsetch 2002-02-06 23:22:34: Wafer is still in the chamber
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Problem stsetch 2002-02-07 11:12:10: Chamber pressures creeping up
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