Shutdown stsetch 2002-02-08 13:45:32: broken wafer in chamber

disney at snf.stanford.edu disney at snf.stanford.edu
Fri Feb 8 01:45:33 PST 2002


Wafer transfer function got confused and thought there was a wafer in the chamber.  It took my new wafer into the chamber and broke it while trying to unload the nonexistent wafer.




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