Shutdown stsetch 2002-02-08 13:45:32: broken wafer in chamber

disney at disney at
Fri Feb 8 01:45:33 PST 2002

Wafer transfer function got confused and thought there was a wafer in the chamber.  It took my new wafer into the chamber and broke it while trying to unload the nonexistent wafer.

More information about the stsetch-pcs mailing list