Shutdown stsetch 2002-02-08 13:45:49: Wafer broken in Chamber

latta at snf.stanford.edu latta at snf.stanford.edu
Fri Feb 8 01:45:52 PST 2002


Sorry, Folks, this one is my fault.  I was doing the recovery from software lock up and did not notice the machine sensed a wafer in the chamber which wasn't really there.  So it tried to load another wafer onto the already occupied chuck- many pieces....




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