Problem stsetch 2002-02-09 11:17:59: back side helium pressure too low
ycfu at snf.stanford.edu
ycfu at snf.stanford.edu
Sat Feb 9 11:18:02 PST 2002
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Problem stsetch 2002-02-09 11:17:59: back side helium pressure too low
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Shutdown stsetch 2002-02-09 23:10:02: wafer broken during unloading
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Problem stsetch 2002-02-09 11:17:59: back side helium pressure too low
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