Shutdown stsetch 2002-02-09 23:10:02: wafer broken during unloading

zhang at snf.stanford.edu zhang at snf.stanford.edu
Sat Feb 9 11:10:04 PST 2002


90min DEEP process. Everything normal during process. Wafer still intact at the last few seconds of etching, but did not come out of chamber during unloading.




More information about the stsetch-pcs mailing list