Shutdown stsetch 2002-02-12 08:38:58: load lock could not pump down

yangxu at snf.stanford.edu yangxu at snf.stanford.edu
Tue Feb 12 08:38:59 PST 2002


the load lock could not pump down while the etching was still going. Then it happened again when Infoco was not set to OFF and the vent was clicked




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