Shutdown stsetch 2002-02-12 08:38:58: load lock could not pump down

yangxu at snf.stanford.edu yangxu at snf.stanford.edu
Tue Feb 12 08:38:59 PST 2002

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the load lock could not pump down while the etching was still going. Then it happened again when Infoco was not set to OFF and the vent was clicked

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