Problem stsetch 2002-02-12 10:36:24: sts etch
mnepo at snf.stanford.edu
mnepo at snf.stanford.edu
Tue Feb 12 10:36:27 PST 2002
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Shutdown stsetch 2002-02-12 08:38:58: load lock could not pump down
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Problem stsetch 2002-02-12 10:36:24: sts etch
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lock excessive gate open time alarm.
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Shutdown stsetch 2002-02-12 08:38:58: load lock could not pump down
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Problem stsetch 2002-02-12 10:36:24: sts etch
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