Shutdown stsetch 2002-02-13 07:15:03: Lock chamber won't pump down
hansen at snf.stanford.edu
hansen at snf.stanford.edu
Wed Feb 13 07:15:06 PST 2002
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Shutdown stsetch 2002-02-13 07:15:03: Lock chamber won't pump down
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Lock chamber won't pump down on wafer unload.
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Shutdown stsetch 2002-02-13 15:10:03: venting problem
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Shutdown stsetch 2002-02-13 07:15:03: Lock chamber won't pump down
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