Shutdown stsetch 2002-02-13 07:57:46: lock chamber won't pump down

hansen at snf.stanford.edu hansen at snf.stanford.edu
Wed Feb 13 07:57:47 PST 2002

Previous message: Shutdown stsetch 2002-02-13 07:15:03: Lock chamber won't pump down
Next message: Shutdown stsetch 2002-02-13 07:57:46: lock chamber won't pump down
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Lock chamber won't pump down on wafer unload.  My wafer is still inside.
-Sean Hansen

Previous message: Shutdown stsetch 2002-02-13 07:15:03: Lock chamber won't pump down
Next message: Shutdown stsetch 2002-02-13 07:57:46: lock chamber won't pump down
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the stsetch-pcs mailing list