Shutdown stsetch 2002-02-13 11:37:59:
qwang at snf.stanford.edu
qwang at snf.stanford.edu
Wed Feb 13 11:38:01 PST 2002
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Problem stsetch 2002-02-13 09:28:47: load lock vent problem
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Shutdown stsetch 2002-02-13 11:37:59:
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Can not unload wafer
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Problem stsetch 2002-02-13 09:28:47: load lock vent problem
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