Problem stsetch 2002-02-14 00:52:44: cannot pump down to <180mT to vent
enwang at snf.stanford.edu
enwang at snf.stanford.edu
Thu Feb 14 12:52:45 PST 2002
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Shutdown stsetch 2002-02-14 11:51:16: Will not vent. My wafer is in load chamber.
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Problem stsetch 2002-02-14 00:52:44: cannot pump down to <180mT to vent
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Shutdown stsetch 2002-02-14 11:51:16: Will not vent. My wafer is in load chamber.
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Problem stsetch 2002-02-14 00:52:44: cannot pump down to <180mT to vent
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