Shutdown stsetch 2002-02-14 05:37:34: software not communicating to hardware

parco at snf.stanford.edu parco at snf.stanford.edu
Thu Feb 14 05:37:35 PST 2002


len-
at the beginning, everything seem to be normal as usual.  ran an initial priming  w/ oxide Si wafer to condition chamber and process recipe.  the cycle was 30 min. with succes and no incident.  cycle complete, unload success, but venting not successful.  it states fault-"pump-out time exceeded" & alarm- "lock excessive pump down time alarm".  chamber not vented completely and software communication lock -up, not allowing to proceed to the next or alternative step.




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