Shutdown stsetch 2002-02-14 05:37:34: software not communicating to hardware

booth at booth at
Thu Feb 14 09:35:54 PST 2002

restarted system software
Len broke wafer in chamber, 7 broke 
1 clamp finger, opened chamber & loadlock,
removed broken wafer, replaced broken clamp
fingers, replaced chuck Helium lip seal.
Ran 30 min O2 clean.
Chamber will need to be seasoned.

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