Shutdown stsetch 2002-02-14 05:37:34: software not communicating to hardware

[booth at snf.stanford.edu]

restarted system software
Len broke wafer in chamber, 7 broke 
1 clamp finger, opened chamber & loadlock,
removed broken wafer, replaced broken clamp
fingers, replaced chuck Helium lip seal.
Ran 30 min O2 clean.
Chamber will need to be seasoned.