Shutdown stsetch 2002-02-14 11:51:16: Will not vent. My wafer is in load chamber.

disney at snf.stanford.edu disney at snf.stanford.edu
Thu Feb 14 11:51:16 PST 2002


Error message "Lock excessive pump down time alarm"
My first wafer vented in an abnormal manner.  Started to vent, then pumped down, then finally vented.
My second wafer finished etching and unloading, but will not vent.




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