Problem stsetch 2002-02-14 18:03:11: backside helium pressure not stable
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Thu Feb 14 06:20:04 PST 2002
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Problem stsetch 2002-02-14 18:03:11: backside helium pressure not stable
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Problem stsetch 2002-02-14 20:33:29: cannot vent
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unload wafer and re-load again
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Problem stsetch 2002-02-14 18:03:11: backside helium pressure not stable
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Problem stsetch 2002-02-14 20:33:29: cannot vent
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