Problem stsetch 2002-02-15 12:20:50: lock excessive pump down time alarm
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Fri Feb 15 03:37:49 PST 2002
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Problem stsetch 2002-02-15 12:20:50: lock excessive pump down time alarm
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Shutdown stsetch 2002-02-17 06:29:48: user Zhang's wafer in etching chamber
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Problem stsetch 2002-02-15 12:20:50: lock excessive pump down time alarm
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Shutdown stsetch 2002-02-17 06:29:48: user Zhang's wafer in etching chamber
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