Problem stsetch 2002-02-17 22:32:26: wafer stuck inside load chamber
zhang at snf.stanford.edu
zhang at snf.stanford.edu
Sun Feb 17 10:32:27 PST 2002
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Shutdown stsetch 2002-02-17 06:29:48: user Zhang's wafer in etching chamber
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Problem stsetch 2002-02-17 22:32:26: wafer stuck inside load chamber
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maximum pumpdown time exceeded alarm
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Shutdown stsetch 2002-02-17 06:29:48: user Zhang's wafer in etching chamber
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Problem stsetch 2002-02-17 22:32:26: wafer stuck inside load chamber
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