Problem stsetch 2002-02-17 22:32:26: wafer stuck inside load chamber
booth at snf.stanford.edu
booth at snf.stanford.edu
Tue Feb 19 07:28:14 PST 2002
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Problem stsetch 2002-02-17 22:32:26: wafer stuck inside load chamber
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Loadlock Gauge problem/observations possibly crash related
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cleared by ericp?
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Problem stsetch 2002-02-17 22:32:26: wafer stuck inside load chamber
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Loadlock Gauge problem/observations possibly crash related
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