Shutdown stsetch 2002-02-26 19:25:54: Load-lock arm sensor failure: wafer fell in chamber
pindermu at snf.stanford.edu
pindermu at snf.stanford.edu
Tue Feb 26 07:25:54 PST 2002
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Shutdown stsetch 2002-02-26 19:25:54: Load-lock arm sensor failure: wafer fell in chamber
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