Problem stsetch 2002-02-26 18:07:01: stsetch fault
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Wed Feb 27 05:46:27 PST 2002
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Problem stsetch 2002-02-26 18:07:01: stsetch fault
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Shutdown stsetch 2002-02-26 19:25:54: Load-lock arm sensor failure: wafer fell in chamber
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Problem stsetch 2002-02-26 18:07:01: stsetch fault
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Shutdown stsetch 2002-02-26 19:25:54: Load-lock arm sensor failure: wafer fell in chamber
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