Problem stsetch 2002-02-28 03:50:22: Finger sticking near flat

kenney at snf.stanford.edu kenney at snf.stanford.edu
Thu Feb 28 03:50:22 PST 2002


When unloading my wafer one of the fingers near the
wafer flat stuck briefly to the aluminum holder. This
caused the holder and wafer to wobble. This may have been
the cause of the misplaced wafer from Tuesday.
Perhaps there's some resist on it?




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