February 2002 Archives by author

Messages sorted by: [ thread ] [ subject ] [ date ]
More info on this list...

Starting: Mon Feb 4 01:53:26 PST 2002
Ending: Thu Feb 28 07:00:51 PST 2002
Messages: 92

Loadlock Gauge problem/observations possibly crash related Eric Perozziello
Shutdown stsetch 2002-02-04 01:53:25: Communications failure on unload booth at snf.stanford.edu
Problem stsetch 2002-02-04 00:03:50: load robot stepper is sick. booth at snf.stanford.edu
Problem stsetch 2002-02-05 07:54:12: STSetch helium back side pressure unstable booth at snf.stanford.edu
Shutdown stsetch 2002-02-12 08:38:58: load lock could not pump down booth at snf.stanford.edu
Shutdown stsetch 2002-02-13 07:15:03: Lock chamber won't pump down booth at snf.stanford.edu
Shutdown stsetch 2002-02-13 07:57:46: lock chamber won't pump down booth at snf.stanford.edu
Problem stsetch 2002-02-13 09:28:47: load lock vent problem booth at snf.stanford.edu
Shutdown stsetch 2002-02-13 11:37:59: booth at snf.stanford.edu
Shutdown stsetch 2002-02-14 13:35:36: wafer will not unload booth at snf.stanford.edu
Problem stsetch 2002-02-14 00:52:44: cannot pump down to <180mT to vent booth at snf.stanford.edu
Shutdown stsetch 2002-02-14 05:37:34: software not communicating to hardware booth at snf.stanford.edu
Problem stsetch 2002-02-14 15:29:42: Lock excessive pump down time alarm during process booth at snf.stanford.edu
Problem stsetch 2002-02-17 22:32:26: wafer stuck inside load chamber booth at snf.stanford.edu
Problem stsetch 2002-02-15 22:09:24: Loadlock gauge error booth at snf.stanford.edu
Shutdown stsetch 2002-02-19 07:52:45: cannot unload wafer booth at snf.stanford.edu
Shutdown stsetch 2002-02-19 09:04:28: cannot unload wafer booth at snf.stanford.edu
Problem stsetch 2002-02-19 09:48:04: pump down problem booth at snf.stanford.edu
Problem stsetch 2002-02-19 08:56:17: cannot unload wafer booth at snf.stanford.edu
Shutdown stsetch 2002-02-19 10:00:44: vent problem booth at snf.stanford.edu
Shutdown stsetch 2002-02-19 12:38:11: maintenance in progress. booth at snf.stanford.edu
Shutdown stsetch 2002-02-22 07:00:47: Maintenance - F-318 bottle change. booth at snf.stanford.edu
Shutdown stsetch 2002-02-22 07:00:47: Maintenance - F-318 bottle change. booth at snf.stanford.edu
Problem stsetch 2002-02-06 23:22:34: Wafer is still in the chamber cbaxter at snf.stanford.edu
Problem stsetch 2002-02-07 11:12:10: Chamber pressures creeping up cbaxter at snf.stanford.edu
Shutdown stsetch 2002-02-08 13:45:49: Wafer broken in Chamber cbaxter at snf.stanford.edu
Shutdown stsetch 2002-02-08 13:45:32: broken wafer in chamber cbaxter at snf.stanford.edu
Shutdown stsetch 2002-02-09 23:10:02: wafer broken during unloading cbaxter at snf.stanford.edu
Problem stsetch 2002-02-09 11:17:59: back side helium pressure too low cbaxter at snf.stanford.edu
Shutdown stsetch 2002-02-13 15:10:03: venting problem cbaxter at snf.stanford.edu
Problem stsetch 2002-02-14 18:03:11: backside helium pressure not stable cbaxter at snf.stanford.edu
Problem stsetch 2002-02-14 20:33:29: cannot vent cbaxter at snf.stanford.edu
Shutdown stsetch 2002-02-15 13:57:37: Computer fan dead. cbaxter at snf.stanford.edu
Problem stsetch 2002-02-15 12:20:50: lock excessive pump down time alarm cbaxter at snf.stanford.edu
Shutdown stsetch 2002-02-19 12:38:11: maintenance in progress. cbaxter at snf.stanford.edu
Shutdown stsetch 2002-02-19 20:29:04: excessive lock pumpdown time cbaxter at snf.stanford.edu
Shutdown stsetch 2002-02-26 19:25:54: Load-lock arm sensor failure: wafer fell in chamber cbaxter at snf.stanford.edu
Problem stsetch 2002-02-26 18:07:01: stsetch fault cbaxter at snf.stanford.edu
Problem stsetch 2002-02-24 10:12:37: enable/disable display problem cbaxter at snf.stanford.edu
Problem stsetch 2002-02-28 03:50:22: Finger sticking near flat cbaxter at snf.stanford.edu
Shutdown stsetch 2002-02-19 11:23:32: load chamber not pumping down davehong at snf.stanford.edu
Shutdown stsetch 2002-02-08 13:45:32: broken wafer in chamber disney at snf.stanford.edu
Shutdown stsetch 2002-02-14 13:35:36: wafer will not unload disney at snf.stanford.edu
Shutdown stsetch 2002-02-14 11:51:16: Will not vent. My wafer is in load chamber. disney at snf.stanford.edu
Problem stsetch 2002-02-14 00:52:44: cannot pump down to <180mT to vent enwang at snf.stanford.edu
Shutdown stsetch 2002-02-04 01:53:25: Communications failure on unload ericp at snf.stanford.edu
Problem stsetch 2002-02-04 00:03:50: load robot stepper is sick. ericp at snf.stanford.edu
Problem stsetch 2002-02-15 22:09:24: Loadlock gauge error ericp at snf.stanford.edu
Shutdown stsetch 2002-02-13 07:15:03: Lock chamber won't pump down hansen at snf.stanford.edu
Shutdown stsetch 2002-02-13 07:57:46: lock chamber won't pump down hansen at snf.stanford.edu
Problem stsetch 2002-02-28 03:50:22: Finger sticking near flat kenney at snf.stanford.edu
Problem stsetch 2002-02-07 00:01:43: wafer still inside chamber latta at snf.stanford.edu
Problem stsetch 2002-02-07 11:12:10: Chamber pressures creeping up latta at snf.stanford.edu
Shutdown stsetch 2002-02-08 13:45:49: Wafer broken in Chamber latta at snf.stanford.edu
Shutdown stsetch 2002-02-12 12:53:06: pump down time alarm latta at snf.stanford.edu
Problem stsetch 2002-02-12 10:36:24: sts etch latta at snf.stanford.edu
Problem stsetch 2002-02-14 14:29:16: Loading chamber is not venting.. latta at snf.stanford.edu
Problem stsetch 2002-02-14 15:23:06: Second time: Load chamber is not venting.. latta at snf.stanford.edu
Shutdown stsetch 2002-02-14 11:51:16: Will not vent. My wafer is in load chamber. latta at snf.stanford.edu
Shutdown stsetch 2002-02-15 13:57:37: Computer fan dead. latta at snf.stanford.edu
Shutdown stsetch 2002-02-19 11:23:32: load chamber not pumping down latta at snf.stanford.edu
Problem stsetch 2002-02-26 18:07:01: stsetch fault leeb at snf.stanford.edu
Problem stsetch 2002-02-12 10:36:24: sts etch mnepo at snf.stanford.edu
Shutdown stsetch 2002-02-12 12:53:06: pump down time alarm mnepo at snf.stanford.edu
Problem stsetch 2002-02-13 09:28:47: load lock vent problem mnepo at snf.stanford.edu
Problem stsetch 2002-02-19 09:48:04: pump down problem mnepo at snf.stanford.edu
Shutdown stsetch 2002-02-19 10:00:44: vent problem mnepo at snf.stanford.edu
Shutdown stsetch 2002-02-14 05:37:34: software not communicating to hardware parco at snf.stanford.edu
Problem stsetch 2002-02-14 14:29:16: Loading chamber is not venting... percin at snf.stanford.edu
Problem stsetch 2002-02-14 15:23:06: Second time: Load chamber is not venting.. percin at snf.stanford.edu
Problem stsetch 2002-02-14 15:29:42: Lock excessive pump down time alarm during process percin at snf.stanford.edu
Shutdown stsetch 2002-02-19 20:29:04: excessive lock pumpdown time pindermu at snf.stanford.edu
Shutdown stsetch 2002-02-19 20:29:04: excessive lock pumpdown time pindermu at snf.stanford.edu
Shutdown stsetch 2002-02-26 19:25:54: Load-lock arm sensor failure: wafer fell in chamber pindermu at snf.stanford.edu
Shutdown stsetch 2002-02-13 11:37:59: qwang at snf.stanford.edu
Shutdown stsetch 2002-02-17 06:29:48: user Zhang's wafer in etching chamber shott at snf.stanford.edu
Problem stsetch 2002-02-06 23:22:34: Wafer is still in the chamber yangxu at snf.stanford.edu
Problem stsetch 2002-02-07 00:01:43: wafer still inside chamber yangxu at snf.stanford.edu
Shutdown stsetch 2002-02-12 08:38:58: load lock could not pump down yangxu at snf.stanford.edu
Shutdown stsetch 2002-02-17 06:29:48: user Zhang's wafer in etching chamber yangxu at snf.stanford.edu
Problem stsetch 2002-02-05 07:54:12: STSetch helium back side pressure unstable ycfu at snf.stanford.edu
Problem stsetch 2002-02-09 11:17:59: back side helium pressure too low ycfu at snf.stanford.edu
Shutdown stsetch 2002-02-13 15:10:03: venting problem ycfu at snf.stanford.edu
Problem stsetch 2002-02-14 18:03:11: backside helium pressure not stable ycfu at snf.stanford.edu
Problem stsetch 2002-02-14 20:33:29: cannot vent ycfu at snf.stanford.edu
Shutdown stsetch 2002-02-19 07:52:45: cannot unload wafer ycfu at snf.stanford.edu
Problem stsetch 2002-02-19 08:56:17: cannot unload wafer ycfu at snf.stanford.edu
Shutdown stsetch 2002-02-19 09:04:28: cannot unload wafer ycfu at snf.stanford.edu
Shutdown stsetch 2002-02-09 23:10:02: wafer broken during unloading zhang at snf.stanford.edu
Problem stsetch 2002-02-15 12:20:50: lock excessive pump down time alarm zhang at snf.stanford.edu
Problem stsetch 2002-02-17 22:32:26: wafer stuck inside load chamber zhang at snf.stanford.edu
Problem stsetch 2002-02-24 10:12:37: enable/disable display problem zhang at snf.stanford.edu

Last message date: Thu Feb 28 07:00:51 PST 2002
Archived on: Fri Jan 11 13:11:08 PST 2013

Messages sorted by: [ thread ] [ subject ] [ date ]
More info on this list...

This archive was generated by Pipermail 0.09 (Mailman edition).