From mnepo at snf.stanford.edu Wed Jan 9 10:44:58 2002 From: mnepo at snf.stanford.edu (mnepo at snf.stanford.edu) Date: Jan 9, 2002 10:44:58 AM Subject: Shutdown stsetch 2002-01-09 10:44:57: sts etcher Message-ID: ceramic finger is broken From cbaxter at snf.stanford.edu Wed Jan 9 07:49:44 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jan 9, 2002 7:49:44 PM Subject: Shutdown stsetch 2002-01-09 10:44:57: sts etcher Message-ID: changed all clamp ceramic fingers. and ran 30mins o2 clean From mcconnel at snf.stanford.edu Tue Jan 15 05:12:00 2002 From: mcconnel at snf.stanford.edu (mcconnel at snf.stanford.edu) Date: Jan 15, 2002 5:12:00 PM Subject: Shutdown stsetch 2002-01-15 17:11:59: pc locked up... Message-ID: From cbaxter at snf.stanford.edu Tue Jan 15 06:22:18 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jan 15, 2002 6:22:18 PM Subject: Shutdown stsetch 2002-01-15 17:11:59: pc locked up... Message-ID: reboot system From xjzhang at snf.stanford.edu Fri Jan 18 10:14:01 2002 From: xjzhang at snf.stanford.edu (xjzhang at snf.stanford.edu) Date: Jan 18, 2002 10:14:01 PM Subject: Comment stsetch 2002-01-18 22:14:00: STS free Sat. 2-6pm Message-ID: From mnepo at snf.stanford.edu Mon Jan 21 09:34:25 2002 From: mnepo at snf.stanford.edu (mnepo at snf.stanford.edu) Date: Jan 21, 2002 9:34:25 AM Subject: Shutdown stsetch 2002-01-21 09:34:23: sts etch Message-ID: Aplication error. I can not unload my wafer. My e-mail: mnepo at megasense.com Phone: 408-655-4016. Mark From booth at snf.stanford.edu Tue Jan 22 07:05:27 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 22, 2002 7:05:27 AM Subject: Shutdown stsetch 2002-01-21 09:34:23: sts etch Message-ID: Restarted system software. Removed User wafer & put in storage dish. From mcconnel at snf.stanford.edu Wed Jan 23 04:45:26 2002 From: mcconnel at snf.stanford.edu (mcconnel at snf.stanford.edu) Date: Jan 23, 2002 4:45:26 AM Subject: Problem stsetch 2002-01-23 04:45:24: ICP transfer mode exit error Message-ID: I'm not sure why this error came up on the screen. I successfully completed an etch, I removed my wafer to go measure the etch depth, and everything seemed normal. I came back to the machine to do a second etch, and this error was on the screen. After I hit OK, most options on the screen were no longer available. For example, I can't vent so can't open the door to load a wafer, plus load isn't available, either. As I mentioned earlier, this happened after I removed my wafer, so nothing is stuck in the machine, but I have no idea how to deal with this problem. From booth at snf.stanford.edu Wed Jan 23 07:04:38 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 23, 2002 7:04:38 AM Subject: Problem stsetch 2002-01-23 04:45:24: ICP transfer mode exit error Message-ID: Had to cold-boot the machine and wait for the Turbo to spin-down. From enwang at snf.stanford.edu Sat Jan 26 03:35:40 2002 From: enwang at snf.stanford.edu (enwang at snf.stanford.edu) Date: Jan 26, 2002 3:35:40 PM Subject: Problem stsetch 2002-01-26 15:35:38: wafer in loading chamber, cannot vent Message-ID: From enwang at snf.stanford.edu Sat Jan 26 04:34:49 2002 From: enwang at snf.stanford.edu (enwang at snf.stanford.edu) Date: Jan 26, 2002 4:34:49 PM Subject: Problem stsetch 2002-01-26 16:34:48: wafer removed, chamber vented, works normally Message-ID: From parco at snf.stanford.edu Mon Jan 28 05:37:07 2002 From: parco at snf.stanford.edu (parco at snf.stanford.edu) Date: Jan 28, 2002 5:37:07 AM Subject: Problem stsetch 2002-01-28 05:37:05: software communication problem Message-ID: len, wafer in loading chamber, but did not properly loaded unable to unload or vent chamber to restart process. everything seem fine except software communicating with stsetch. the sreen showed the loading stage entering the etch chamber, but that's not the case. in addition, its alarming about excessive pump down time alarm. did not get the opportunity to prime or etch. the previous user must had some other problems prior. so I decided to put it a shutdown to avoid further complication. From parco at snf.stanford.edu Mon Jan 28 05:38:26 2002 From: parco at snf.stanford.edu (parco at snf.stanford.edu) Date: Jan 28, 2002 5:38:26 AM Subject: Shutdown stsetch 2002-01-28 05:38:24: please see previous message. parco Message-ID: From latta at snf.stanford.edu Mon Jan 28 11:42:15 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jan 28, 2002 11:42:15 AM Subject: Shutdown stsetch 2002-01-28 05:38:24: please see previous message. parco Message-ID: Software reset, loadlock cleared. Test run ok. From latta at snf.stanford.edu Mon Jan 28 11:42:27 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jan 28, 2002 11:42:27 AM Subject: Problem stsetch 2002-01-28 05:37:05: software communication problem Message-ID: Cleared From latta at snf.stanford.edu Mon Jan 28 11:42:57 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jan 28, 2002 11:42:57 AM Subject: Problem stsetch 2002-01-26 16:34:48: wafer removed, chamber vented, works normally Message-ID: Good job! From latta at snf.stanford.edu Mon Jan 28 11:43:10 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jan 28, 2002 11:43:10 AM Subject: Problem stsetch 2002-01-26 15:35:38: wafer in loading chamber, cannot vent Message-ID: User cleared From jdas at snf.stanford.edu Wed Jan 30 03:25:11 2002 From: jdas at snf.stanford.edu (jdas at snf.stanford.edu) Date: Jan 30, 2002 3:25:11 PM Subject: Shutdown stsetch 2002-01-30 15:25:10: Turbo shut down during unload/vent sequence Message-ID: From rcrane at snf.stanford.edu Wed Jan 30 04:49:12 2002 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Jan 30, 2002 4:49:12 PM Subject: Shutdown stsetch 2002-01-30 15:25:10: Turbo shut down during unload/vent sequence Message-ID: Turbo reset